Semiconductor device and method for manufacturing the same
A semiconductor device provided with a capacitor that includes a plurality of cylindrical or columnar storage electrodes provided periodically on a semiconductor substrate, capacitor insulation films that cover the wall surfaces of the storage electrodes, and first conductive films provided on the capacitor insulation film and facing the storage electrodes, wherein the first conductive films of the capacitors adjacent in a first direction in which the storage electrodes are arranged are in contact with each other, and the first conductive films of capacitors adjacent in remaining other directions in which the storage electrodes are arranged are separated from each other.
1. A semiconductor device comprising:
capacitors which contain a plurality of crown-type or column-type storage electrodes provided upright in a periodic manner on a semiconductor substrate;
capacitative insulating films covering wall surfaces of the storage electrodes; and
first conductive films on the capacitative insulating films, on the opposite side to the storage electrodes, wherein
in plan view, a first column of the storage electrodes is adjacent to a second column of the storage electrodes,
the first conductive films of the storage electrodes of the first column contact each other, and
the first conductive films of the storage electrodes of the second column are separated from the first conductive films of the storage electrodes of the first column.
2. The semiconductor device of claim 1 , wherein, a gap between the storage electrodes of the first column is at most equal to the sum of twice the thickness of the first conductive film and twice the thickness of the capacitative insulating film, and is at least equal to the sum of the thickness of the upper electrode and twice the thickness of the capacitative insulating film.
3. The semiconductor device of claim 2 , wherein, a gap between the storage electrodes of the first column and the storage electrodes of the second column is greater than the sum of twice the thickness of the first conductive film and twice the thickness of the capacitative insulating film.
4. The semiconductor device of claim 1 , wherein the storage electrodes are connected to a support film having open portions, and each capacitor adjoins only one of the open portions.
5. The semiconductor device of claim 4 , wherein the open portions are of a shape having a width and a length, and the width of the open portions is at most equal to the minimum of the distances between the centers of adjacent storage electrodes in the first column or the distances between the centers of the storage electrodes in the first column and the storage electrodes in the second column, and is greater than the sum of twice the thickness of the first conductive film and twice the thickness of the capacitative insulating film.
6. The semiconductor device of claim 5 , wherein the open portions have the lengths in a direction in which the storage electrodes of the first column are disposed, and the first conductive films of adjacent that face the open portions are separated from one another.
7. The semiconductor device of claim 5 , wherein the open portions have the lengths in a direction different from a direction in which the storage electrodes of the first column are disposed, the first conductive films of storage electrodes of the first column that face the open portions are in contact with one another, and the first conductive films of adjacent storage electrodes of the first and second columns that face the open portions are separated from one another.
8. The semiconductor device of claim 1 , wherein the storage electrodes are crown-type storage electrodes, and the capacitative insulating film and the first conductive film are also formed on the inner walls of the circular tube-type storage electrodes.
9. The semiconductor device of claim 8 , wherein a second conductive film is formed on the first conductive film to fill voids on the inner wall sides of the storage electrodes and gaps between the storage electrodes.
10. The semiconductor device of claim 1 , wherein the storage electrodes are column-type storage electrodes.
11. The semiconductor device of claim 1 , wherein
a first storage electrode and a second storage electrode in the first column have a first center-to-center distance,
the first storage electrode in the first column and a third storage electrode in the second column have a second center-to-center distance, and
the first storage electrode in the first column and a fourth storage electrode in the second column have a third center-to-center distance.
12. The semiconductor device of claim 11 , wherein the outside surfaces of the storage electrodes have a substantially circular peripheral shape, and the second and third center-to-center distances are greater than the first center-to-center distance.
13. The semiconductor device of claim 11 , wherein the outside surfaces of the storage electrodes have an elliptical peripheral shape having a major diameter in the first direction, and the second and third center-to-center distances are equal to or less than the first center-to-center distance.
14. The semiconductor device of claim 11 , wherein the storage electrodes are connected to a support film having open portions, the open portions have lengths in a direction in which the storage electrodes of the first column are disposed, and each capacitor adjoins only one of the opening portions.
15. The semiconductor device of claim 11 , wherein the storage electrodes are connected to a support film having open portions, the open portions have lengths in a direction different from a direction in which the storage electrodes of the first column are disposed, and each capacitor adjoins only one of the opening portions.
16. The semiconductor device of claim 14 , wherein the open portions adjoin, on a first side surface side of the first column of storage electrodes three capacitors respectively.
17. The semiconductor device of claim 1 , wherein
a first storage electrode and a second storage electrode in the first column have a first center-to-center distance, and
the first storage electrode in the first column and a third storage electrode in the second column have a second center-to-center distance.
18. The semiconductor device of claim 17 , wherein the storage electrodes are connected to a support film having open portions, the open portions have lengths in a direction in which the storage electrodes of the first column are disposed, and each capacitor adjoins only one of the opening portions.
19. The semiconductor device of claim 17 , wherein the storage electrodes are connected to a support film having open portions, the open portions have lengths in a direction different from a direction in which the storage electrodes of the first column are disposed, and each capacitor adjoins only one of the opening portions.
20. The semiconductor device of claim 18 , wherein the open portions adjoin, on a first side surface side of the first column of storage electrodes, three capacitors respectively.
21. The semiconductor device of claim 1 , wherein a third column of the storage electrodes is disposed adjacent to the first column of the storage electrodes on a side opposite to where the second column of storage electrodes are disposed, and the first conductive films of the storage electrodes of the third column are separated from the first conductive films of the storage electrodes of the first column.