SEMICONDUCTOR DEVICE
[Problem] To match operating conditions during normal operations in which a bump electrode is used and operating conditions during test operations when a test pad is used. [Solution] A semiconductor device comprises a bump electrode (PLV 0 ), a test pad (TPV), internal circuitry ( 31 ), power source wiring (V 1 ) which connects the bump electrode (PLV 0 ) and a node (N 1 ), power source wiring (V 2 ) which connects the test pad (TPV) and the node (N 1 ), and power source wiring (V 3 ) which connects the node (N 1 ) and the internal circuitry ( 31 ). The power source wiring (V 1 ) and the power source wiring (V 2 ) are designed so that the resistance values are substantially equal to each other. Thus, because the operating conditions during normal operation and during test operations are substantially the same, the yield rate can be improved due to the elimination of mistaken determinations of non-defective products, or conversely, mistaken determinations of defective products.
1 . A semiconductor device comprising:
a bump electrode;
a test pad;
an internal circuit;
a first wiring line portion connecting the bump electrode to a wiring line node;
a second wiring line portion connecting the test pad to the wiring line node; and
a third wiring line portion connecting the wiring line node to the internal circuit;
wherein the resistance values of the first wiring line portion and the second wiring line portion are substantially equal to one another.
2 . The semiconductor device of claim 1 , wherein the first to third wiring line portions are power-supply wiring lines which supply an external power-supply potential to the internal circuit.
3 . The semiconductor device of claim 2 , wherein the internal circuit includes an internal power-supply generating circuit which generates an internal power-supply potential on the basis of the external power-supply potential.
4 . The semiconductor device of claim 2 , wherein at least a portion of the first wiring line portion is constructed in the shape of a mesh.
5 . The semiconductor device of claim 1 , wherein the first to third wiring line portions are signal wiring lines which supply signals to the internal circuit.
6 . The semiconductor device of claim 5 , wherein the resistance values of the first wiring line portion and the second wiring line portion are substantially equal to one another.
7 . The semiconductor device of claim 1 , comprising a through-electrode which is provided in a position overlapping the bump electrode as seen in a plan view, and which penetrates through the semiconductor substrate.
8 . A semiconductor device comprising:
a plurality of semiconductor chips which are stacked on one another, wherein each of the plurality of semiconductor chips comprises:
a bump electrode;
a test pad;
an internal circuit;
a first wiring line portion connecting the bump electrode to a wiring line node;
a second wiring line portion connecting the test pad to the wiring line node; and
a third wiring line portion connecting the wiring line node to the internal circuit, wherein
at least one of the plurality of semiconductor chips is provided with a through-electrode provided penetrating through said semiconductor chip,
the internal circuits contained in each of the plurality of semiconductor chips are commonly connected by way of the bump electrodes and the through-electrodes, and
the resistance values of the first wiring line portion and the second wiring line portion contained in each of the plurality of semiconductor chips are substantially equal to one another.
9 . The semiconductor device of claim 8 , wherein the bump electrode and the through-electrode are disposed in positions that overlap one another as viewed in the stacking direction.
10 . The semiconductor device of claim 8 , wherein each of the plurality of semiconductor chips is a memory chip having a memory cell array.
11 . The semiconductor device of claim 10 , comprising a control chip which controls the plurality of memory chips, and the plurality of memory chips and the control chip are stacked on one another.