Manufacturing method for semiconductor device
A gate oxide film is formed in a region having a MOSFET on a semiconductor substrate formed therein, and a first polysilicon film serving as a gate electrode of the MOSFET is further formed. Thereafter, a charge storage three-layer film is formed by opening a region having a MONOS type FET formed therein, exposing a semiconductor surface of the semiconductor substrate, and sequentially depositing a first potential barrier film, a charge storage film, and a second potential barrier film. In this case, before the charge storage three-layer film is formed, an anti-oxidation film is formed on the first polysilicon film.
1. A method for forming a semiconductor device including a first FET and a second FET, the method comprising:
(d) forming a gate insulating film in a region having the first FET on a semiconductor substrate formed therein;
(e) forming a first polysilicon film to which an impurity is added, in the region having the first FET formed therein, after the step (d);
(h) forming an anti-oxidation film on the first polysilicon film, after the step (e);
(i) exposing a semiconductor surface of the semiconductor substrate in a region having the second FET formed therein, after the step (h); and
(m) forming a silicon oxide film on the entire semiconductor surface of the semiconductor device after the step (i), to form at least a portion of a gate insulating film of the second FET on the semiconductor surface exposed in the step (i).
2. The method according to claim 1 , wherein the first FET is a P channel MOSFET.
3. The method according to claim 2 , wherein the gate insulating film formed in the step (d) is a silicon oxide film.
4. The method according to claim 2 , wherein and the impurity added to the first polysilicon film is boron.
5. The method according to claim 1 , wherein the second FET is a MONOS type FET.
6. The method according to claim 5 , wherein the step (m) comprises:
forming a charge storage three-layer film.
7. The method according to claim 6 , wherein forming a charge storage three-layer film further comprises:
sequentially depositing a charge storage film and a second potential barrier film on the silicon oxide film.
8. The method according to claim 5 , wherein the anti-oxidation film is a silicon nitride film, the charge storage film is a silicon nitride film or a silicon oxynitride film, and the second potential barrier film is a silicon oxide film.
9. The method according to claim 1 , further comprising:
(f) a step of forming an insulating layer that isolates the first FET and the second FET from other elements, after the step (e); and
(g) a step of further forming a second polysilicon film to which an impurity is added, in the region having the second FET formed therein after the step (f) and before the step (h),
wherein the step (h) is a step of forming the anti-oxidation film on the second polysilicon film, instead of the first polysilicon film.