IP Library Granted Patent US 9,368,459
Granted Patent B2
US 9,368,459 · App. 14/581,452 · Granted Jun 14, 2016

Semiconductor chip with seal ring and sacrificial corner pattern

Inventors: Takeshi Furusawa (Tokyo, JP); Noriko Miura (Tokyo, JP); Kinya Goto (Tokyo, JP); Masazumi Matsuura (Tokyo, JP)
Assignee: ACACIA RESEARCH GROUP LLC
H01L23/585H01L23/564H01L23/3192H01L23/53295H01L2924/0002
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Quick Facts
Patent No.
US 9,368,459
App. No.
14/581,452
Granted
Jun 14, 2016
Kind
B2
Abstract

A semiconductor device including a low dielectric constant film of which the relative dielectric constant is less than 3.5, is provided with one or more seal rings that are moisture blocking walls forming a closed loop in a plan view, and where at least one of the seal rings includes a seal ring protrusion portion in inward protruding form in the vicinity of a chip corner.

Claims (13)

1. A semiconductor device, comprising:

a low dielectric constant film having a relative dielectric constant less than 3.5;

a seal ring which is a moisture blocking wall forming a closed loop in a plan view; and

a sacrifice pattern group that includes a plurality of the sacrifice patterns,

wherein said seal ring includes a seal ring protrusion portion in inward protruding form in a vicinity of a corner of a chip,

wherein a passivation film covers said low dielectric constant film and the seal ring, and has a opening penetrating the passivation film, the opening formed in a vicinity of two chip end surfaces in a plan view, said two chip end surfaces forming the corner of the chip,

wherein a sacrifice pattern is provided outside of said sealing protrusion portion of the seal ring from a center of a chip,

wherein the sacrifice pattern is a structure in wall-form for preventing progress of a crack

wherein said passivation film is made of a SiN,

wherein said seal rings includes a Cu seal ring and Al seal ring formed above said Cu seal ring and said sacrifice pattern includes a Cu sacrifice pattern,

wherein an Al sacrifice pattern is not formed above said sacrifice pattern,

wherein said plurality of the sacrifice patterns has a linked layer of which the portions are connected to each other, and

wherein said linked layer is in mesh form in a plan view.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 053654 FRAME: 0254. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 10, 2021
From: STARBOARD VALUE INTERMEDIATE FUND LP
To: ACACIA RESEARCH GROUP LLC
Reel/Frame 057454/0045 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR NAME PREVIOUSLY RECORDED ON REEL 052853 FRAME 0153. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT. Recorded Mar 2, 2021
From: ACACIA RESEARCH GROUP LLC
To: STARBOARD VALUE INTERMEDIATE FUND LP, AS COLLATERAL AGENT
Reel/Frame 056775/0066 →
RELEASE OF SECURITY INTEREST IN PATENTS Recorded Jul 8, 2020
From: STARBOARD VALUE INTERMEDIATE FUND LP
To: ACACIA RESEARCH GROUP LLC; AMERICAN VEHICULAR SCIENCES LLC; BONUTTI SKELETAL INNOVATIONS LLC; CELLULAR COMMUNICATIONS EQUIPMENT LLC; INNOVATIVE DISPLAY TECHNOLOGIES LLC; LIFEPORT SCIENCES LLC; LIMESTONE MEMORY SYSTEMS LLC; MOBILE ENHANCEMENT SOLUTIONS LLC; MONARCH NETWORKING SOLUTIONS LLC; NEXUS DISPLAY TECHNOLOGIES LLC; PARTHENON UNIFIED MEMORY ARCHITECTURE LLC; R2 SOLUTIONS LLC; SAINT LAWRENCE COMMUNICATIONS LLC; STINGRAY IP SOLUTIONS LLC; SUPER INTERCONNECT TECHNOLOGIES LLC; TELECONFERENCE SYSTEMS LLC; UNIFICATION TECHNOLOGIES LLC
Reel/Frame 053654/0254 →
PATENT SECURITY AGREEMENT Recorded Jun 5, 2020
From: ACACIA RESEARCH GROUP LLC; AMERICAN VEHICULAR SCIENCES LLC; BONUTTI SKELETAL INNOVATIONS LLC; CELLULAR COMMUNICATIONS EQUIPMENT LLC; INNOVATIVE DISPLAY TECHNOLOGIES LLC; LIFEPORT SCIENCES LLC; LIMESTONE MEMORY SYSTEMS LLC; MERTON ACQUISITION HOLDCO LLC; MOBILE ENHANCEMENT SOLUTIONS LLC; MONARCH NETWORKING SOLUTIONS LLC; NEXUS DISPLAY TECHNOLOGIES LLC; PARTHENON UNIFIED MEMORY ARCHITECTURE LLC; R2 SOLUTIONS LLC; SAINT LAWRENCE COMMUNICATIONS LLC; STINGRAY IP SOLUTIONS LLC; SUPER INTERCONNECT TECHNOLOGIES LLC; TELECONFERENCE SYSTEMS LLC; UNIFICATION TECHNOLOGIES LLC
To: STARBOARD VALUE INTERMEDIATE FUND LP, AS COLLATERAL AGENT
Reel/Frame 052853/0153 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2016
From: FURUSAWA, TAKESHI; MIURA, NORIKO; GOTO, KINYA; MATSUURA, MASAZUMI
To: RENESAS TECHNOLOGY CORP.
Reel/Frame 038532/0007 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2016
From: RENESAS ELECTRONICS CORPORATION
To: ACACIA RESEARCH GROUP LLC
Reel/Frame 038532/0636 →
Priority Claims (1)
JP 2004-264014 · Sep 10, 2004 · national
Continuity (4)
Division 13112738 · May 20, 2011
Continuation 12410170 · Mar 24, 2009
Continuation 11220603 · Sep 8, 2005
Related Publication 20150108613A1 · Apr 23, 2015