IP Library Granted Patent US 9,425,175
Granted Patent B2
US 9,425,175 · App. 15/002,333 · Granted Aug 23, 2016

Methods for performing extended wafer-level packaging (eWLP) and eWLP devices made by the methods

Inventors: Detlef Bernd Krabe (Munich, DE); Josef Wittl (Parsberg, DE)
Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
H01L25/167H01L23/3114H01L23/5386H01L25/165H01L31/02002H01L31/167H01S5/02248
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Quick Facts
Patent No.
US 9,425,175
App. No.
15/002,333
Granted
Aug 23, 2016
Kind
B2
Abstract

Embedded Wafer-Level Packaging (eWLP) devices, packages and assemblies and methods of making them are provided. The eWLP methods allow back side electrical and/or thermal connections to be easily and economically made at the eWLP wafer level without having to use thru-mold vias (TMVs) or thru-silicon vias (TSVs) to make such connections. In order to create TMVs, processes such as reactive ion etching or laser drilling followed metallization are needed, which present difficulties and increase costs. In addition, the eWLP methods allow electrical and optical interfaces to be easily and economically formed on the front side and/or on the back side of the eWLP wafer, which allows the eWLP methods to be used to form optoelectronic devices having a variety of useful configurations.

Claims (32)

1. An embedded Wafer-Level Packaging (eWLP) package comprising:

at least first and second chips encapsulated inside of a molded material, the molded material having a front side and a back side, the front side of the molded material being co-planar with respective front sides of the first and second chips, a back side of the molded material being parallel to the front side of the molded material, the first and second chips having respective first electrical contacts disposed on respective front sides of the first and second chips and exposed thru the front side of the molded material, the first chip having at least one second electrical contact disposed on a back side of the first chip; and

a metal layer disposed on the back side of the molded material, the second electrical contact disposed on the back side of the first chip being electrically coupled to the metal layer, the back side of the second chip being in contact with the metal layer, and wherein the second chip comprises a bulk material having a predetermined electrical conductivity that is sufficiently high for conducting electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip.

2. The eWLP package of claim 1 , wherein the first chip is an electrical-to-optical converter (EO) chip for converting an electrical signal into an optical signal and wherein the second chip comprises a combination of an EO driver for driving the EO chip and an optical-to-electrical (OE) converter for converting an optical signal received by the second chip into an electrical signal.

3. The eWLP package of claim 2 , wherein the EO chip is a light-emitting diode (LED) chip, the EO driver is an LED driver and the OE converter is a photodiode.

4. The eWLP package of claim 2 , wherein the EO chip is a laser diode chip, the EO driver is a laser diode driver and the OE converter is a photodiode.

5. The eWLP package of claim 1 , wherein a purpose of the second chip is to conduct electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip such that an electrical connection is made via the second chip and the metal layer to said at least one second electrical contact disposed on the back side of the first chip.

6. The eWLP package of claim 1 , further comprising:

at least a third chip encapsulated inside of the molded material such that the front side of the molded material is co-planar with a front side of the third chip, the third chip having at least one first electrical contact disposed on the front side thereof and exposed thru the front side of the molded material, the third chip having at least one second electrical contact disposed on a back side of the third chip, and wherein the metal layer disposed on the back side of the molded material is electrically coupled to the second electrical contact disposed on the back side of the third chip.

7. The eWLP package of claim 6 , wherein a purpose of the second chip is to conduct electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip such that an electrical connection is made via the second chip and the metal layer to said at least one second electrical contact disposed on the back side of the first chip.

8. The eWLP package of claim 7 , wherein the first chip is an optical-to-electrical (OE) converter chip for converting an optical signal into an electrical signal, and wherein the third chip is a receiver chip for processing the electrical signal.

9. The eWLP package of claim 7 , wherein the first chip is an electrical-to-optical (EO) converter chip for converting an electrical signal into an optical signal.

10. The eWLP package of claim 9 , wherein the EO converter chip is a light-emitting diode (LED) chip.

11. The eWLP package of claim 10 , wherein the third chip is an LED driver chip.

12. The eWLP package of claim 9 , wherein the EO converter chip is a laser diode chip.

13. The eWLP package of claim 12 , wherein the third chip is a laser diode driver chip.

14. The eWLP package of claim 9 , wherein the third chip is an optical-to-electrical (OE) converter chip that converts an optical signal received by the OE converter chip into an electrical signal.

15. The eWLP package of claim 14 , wherein the OE converter chip is a photodiode chip.

16. The eWLP package of claim 14 , wherein the second chip is a receiver chip for processing the electrical signal.

17. An embedded Wafer-Level Packaging (eWLP) package comprising:

at least first, second and third chips encapsulated inside of a molded material, the molded material having a front side and a back side, the front side of the molded material being co-planar with respective front sides of the first, second and third chips, a back side of the molded material being parallel to the front side of the molded material, the first, second and third chips having respective first electrical contacts disposed on respective front sides of the first, second and third chips and exposed thru the front side of the molded material, the first and third chips each having at least one second electrical contact disposed on a back side of the first and third chips; and

a metal layer disposed on the back side of the molded material, the second electrical contacts disposed on the back sides of the first and third chips being electrically coupled to the metal layer, the back side of the second chip being in contact with the metal layer, and wherein the second chip comprises a bulk material having a predetermined electrical conductivity that is sufficiently high for conducting electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip, and wherein a purpose of the second chip is to conduct electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip such that an electrical connection is made via the second chip and the metal layer to said at least one second electrical contact disposed on the back side of the first chip.

18. The eWLP package of claim 17 , wherein the first chip is an optical-to-electrical (OE) converter chip for converting an optical signal into an electrical signal, and wherein the third chip is a receiver chip for processing the electrical signal.

19. The eWLP package of claim 17 , wherein the first chip is an electrical-to-optical (EO) converter chip for converting an electrical signal into an optical signal.

20. The eWLP package of claim 19 , wherein the third chip is an optical-to-electrical (OE) converter chip that converts an optical signal received by the OE converter chip into an electrical signal.

21. An embedded Wafer-Level Packaging (eWLP) assembly comprising:

a circuit board (CB) having a plurality of electrical contacts disposed on a first surface thereof;

an eWLP package comprising:

at least first and second chips encapsulated inside of a molded material, the molded material having a front side and a back side, the front side of the molded material being co-planar with respective front sides of the first and second chips, a back side of the molded material being parallel to the front side of the molded material, the first and second chips having respective first electrical contacts disposed on respective front sides of the first and second chips and exposed thru the front side of the molded material, the first chip having at least one second electrical contact disposed on a back side of the first chip, and

a metal layer disposed on the back side of the molded material, the second electrical contact disposed on the back side of the first chip being electrically coupled to the metal layer, the back side of the second chip being in contact with the metal layer, and wherein the second chip comprises a bulk material having a predetermined electrical conductivity that is sufficiently high for conducting electrical current from the first electrical contact disposed on the front side of the second chip to the back side of the second chip;

and

a plurality of electrically-conductive contact elements, each electrically conductive contact element interconnecting one of the first electrical contacts disposed on the front sides of the first and second chips and one of the electrical contacts disposed on the first surface of the CB.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 9,385,856 TO 9,385,756 PREVIOUSLY RECORDED AT REEL: 47349 FRAME: 001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Mar 22, 2019
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 051144/0648 →
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE PREVIOUSLY RECORDED ON REEL 047229 FRAME 0408. ASSIGNOR(S) HEREBY CONFIRMS THE THE EFFECTIVE DATE IS 09/05/2018. Recorded Oct 29, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047349/0001 →
MERGER Recorded Oct 4, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047229/0408 →
Continuity (2)
Division 14213342 · Mar 14, 2014
Related Publication 20160141279A1 · May 19, 2016