Surface treatment of magnetic recording heads for improving the robustness thereof
In one embodiment, a method includes forming a structure having a first region including a ceramic material, a second region including a plurality of particles disposed in a ceramic matrix material, and a magnetic head assembly disposed in the first region. The method also includes directing a first ion beam at a side of the first and second regions of the structure, the first ion beam including an oxidizing species to oxidize one or more portions of the particles located near the side of the second region, where the one or more oxidized portions of the particles protrude from the side of the ceramic matrix material of the second region. The method further includes directing a second ion beam at the side of the first and second regions of the structure, the second ion beam including an inert species to recess the first and second regions.
1. A method, comprising:
forming a structure comprising:
a first region comprising a ceramic material,
a second region comprising a plurality of particles disposed in a ceramic matrix material, and
a magnetic head assembly disposed in the first region; and
directing a first ion beam at a side of the first and second regions of the structure, wherein the first ion beam comprises an oxidizing species to oxidize one or more portions of the plurality of particles located near the side of the second region, wherein the one or more portions of the plurality of particles that are oxidized protrude from the side of the ceramic matrix material of the second region; and
directing a second ion beam at the side of the first and second regions of the structure, wherein the second ion beam comprises an inert species to recess the first region and the second region by a predetermined amount.
2. The method as recited in claim 1 , wherein the side of the first and second regions of the structure is a media facing side.
3. The method as recited in claim 1 , wherein the ceramic material of the first region comprises one or more oxides.
4. The method as recited in claim 3 , wherein the ceramic material of the first region comprises alumina.
5. The method as recited in claim 1 , wherein the ceramic matrix material of the second region comprises one or more oxides, and wherein the particles of the second region do not include an oxide.
6. The method as recited in claim 5 , wherein the ceramic matrix material of the second region comprises alumina, and wherein the plurality of particles of the second region each comprise titanium carbide.
7. The method as recited in claim 1 , wherein the ceramic material of the first region and the ceramic matrix material of the second region are not oxidized from exposure to the oxidizing species in the first ion beam.
8. The method as recited in claim 2 , further comprising depositing a protective overcoat on the media facing side of the structure after directing the second ion beam at the media facing side thereof.
9. The method as recited in claim 8 , wherein an adhesive layer is deposited between the media facing side of the structure and the protective overcoat.
10. The method as recited in claim 1 , wherein the oxidizing species comprises oxygen ions.
11. The method as recited in claim 1 , wherein the first ion beam comprises an inert species in combination with the oxidizing species.
12. The method as recited in claim 11 , wherein the oxidizing species is present in the first ion beam in an amount ranging from about 28% to about 35%.
13. The method as recited in claim 1 , wherein the second ion beam does not comprise an oxidizing species.
14. The method as recited in claim 1 , wherein the inert species comprises argon ions, and the oxidizing species comprises oxygen ions.
15. The method as recited in claim 1 , wherein after directing the first ion beam to the side of the structure, the side of the second region has a surface roughness in a range from about 0.5 nm to about 0.7 nm.
16. The method as recited in claim 1 , wherein one or more portions of the magnetic head assembly located near the side of the first region are oxidized from exposure to the oxidizing species in the first ion beam, wherein the one or more portions of the magnetic head assembly that are oxidized protrude from the side of the ceramic material of the first region.
17. The method as recited in claim 1 , further comprising lapping the side of the structure prior to directing the first and second ion beams at the side of the structure, wherein after the lapping, the side of the first region is recessed relative to the side of the second region.
18. The method as recited in claim 1 , wherein directing the second ion beam at the side of the structure removes all oxidized portions of the plurality of particles and the magnetic head assembly.