IP Library Granted Patent US 10,505,054
Granted Patent B2
US 10,505,054 · App. 15/679,827 · Granted Dec 10, 2019

High speed photosensitive devices and associated methods

Inventors: James E. Carey (Ann Arbor, MI); Drake Miller (Tigard, OR)
Assignee: SiOnyx, LLC
H01L31/02024H01L27/1446H01L27/14629H01L27/14643H01L31/028H01L31/02363H01L31/103Y02E10/50
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Quick Facts
Patent No.
US 10,505,054
App. No.
15/679,827
Granted
Dec 10, 2019
Kind
B2
Abstract

High speed optoelectronic devices and associated methods are provided. In one aspect, for example, a high speed optoelectronic device can include a silicon material having an incident light surface, a first doped region and a second doped region forming a semiconductive junction in the silicon material, and a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation. The optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a responsivity of greater than or equal to about 0.4 A/W for electromagnetic radiation having at least one wavelength from about 800 nm to about 1200 nm.

Claims (21)

1. A method for configuring an optoelectronic device for light detection and ranging, the method comprising:

doping at least two regions in a silicon optoelectronic device material to form at least one depletion region, wherein the silicon optoelectronic device material exhibits a thickness in a range of about 1 micron to about 100 microns and comprises a surface for receiving incident radiation;

providing an infrared optical band pass filter for reducing unwanted ambient light; and

texturing the silicon material to form a textured region positioned to interact with electromagnetic radiation so as to increase the quantum efficiency of the optoelectronic device,

wherein the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a quantum efficiency of greater than or equal to about 40% for electromagnetic radiation having a wavelength of about 940 nm.

2. A system for performing light detection and ranging, comprising:

a silicon optoelectronic device material exhibiting a thickness in a range of about 1 micron to about 100 microns and having a surface for receiving incident radiation;

a first doped region and a second doped region forming at least one depletion region in the silicon material;

an infrared optical bandpass filter for reducing unwanted ambient light; and

a textured region coupled to the silicon material and positioned to interact with electromagnetic radiation so as to increase the quantum efficiency of the optoelectronic device,

wherein the optoelectronic device has a response time of from about 1 picosecond to about 5 nanoseconds and a quantum efficiency of greater than or equal to about 40% for electromagnetic radiation having a wavelength of about 940 nm.

3. The system of claim 2 , wherein the silicon optoelectronic device material exhibits a thickness in a range of about 1 micron to about 10 microns.

4. The system of claim 2 , wherein the silicon optoelectronic device material exhibits a thickness in a range of about 1 micron to about 5 microns.

5. The system of claim 2 , wherein the textured region is formed via one of lasing, chemical etching, nanoimprinting, and reactive ion etching.

6. The system of claim 2 , wherein the textured region is associated with the surface of the silicon material nearest the impinging electromagnetic radiation.

7. The system of claim 2 , wherein the silicon optoelectronic device material comprises an array of photodetectors.

8. The system of claim 7 , further comprising an isolation structure disposed between each of the photodectectors.

9. The system of claim 8 , wherein the isolation structure comprises one of dielectric materials, reflective materials, conductive materials, and combinations thereof.

10. The system of claim 2 , wherein the array is operable to detect a phase delay between a reflected and an emitted optical signal.

11. The system of claim 10 , further comprising a light source configured to emit an optical signal.

12. The system of claim 11 , wherein the light source is configure to emit electromagnetic radiation at a wavelength of about 940 nm.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2019
From: CAREY, JAMES; MILLER, DRAKE
To: SIONYX, INC.
Reel/Frame 050869/0966 →
CHANGE OF NAME Recorded Oct 30, 2019
From: SIONYX, INC.
To: SIONYX, LLC
Reel/Frame 050895/0275 →
Continuity (4)
Continuation 14580143 · Dec 14, 2014
Continuation 13164630 · Jun 20, 2011
Provisional Application 61356536 · Jun 18, 2010
Related Publication 20170345951A1 · Nov 30, 2017