IP Library Granted Patent US 10,792,713
Granted Patent B1
US 10,792,713 · App. 16/460,935 · Granted Oct 6, 2020

Pick and place machine cleaning system and method

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Quick Facts
Patent No.
US 10,792,713
App. No.
16/460,935
Granted
Oct 6, 2020
Kind
B1
Abstract

A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.

Claims (22)

1. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having a set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the vacuum pickup tool and the vacuum inlet/outlet of the vacuum pickup tool of the pick and place machine to transfer to the cleaning material and a textured surface that cleans an inside surface and an outside surface of the vacuum pickup tool.

2. The cleaning device of claim 1 , wherein the surface tackiness is in a range between 20 grams and 800 grams.

3. The cleaning device of claim 2 , wherein the set of microfeatures are one of microcolumns and micropyramids.

4. The cleaning device of claim 1 , wherein the cleaning material further comprises a cleaning pad layer and one or more intermediate layers underneath the cleaning pad layer that support the cleaning pad layer.

5. The cleaning device of claim 4 , wherein the intermediate layers are one of rigid layers, compliant layers and rigid and compliant layers.

6. The cleaning device of claim 4 , wherein the cleaning pad layer further comprises a plurality of abrasive particles having a Mohs Hardness of 7 or greater.

7. The cleaning device of claim 6 , wherein the cleaning material has the specific gravity in a range of 0.75 to 2.27, the modulus of elasticity in a range of 40-MPa to 600-MPa, the tackiness in a range of 20 to 800 grams, the thickness in a range between 25-μm and 500-μm, each layer has a hardness between 30 Shore A and 90 Shore A, and the porosity in a range of 10 to 150 micropores per inch.

8. The cleaning device of claim 1 , wherein the cleaning material further comprises a release layer on top of the top surface of the cleaning material that protects the cleaning material.

9. The cleaning device of claim 1 , wherein the cleaning material has a specific gravity, an elasticity, a tackiness, a thickness and a porosity.

10. The cleaning device of claim 9 , wherein the cleaning material is one of a rubber, a natural polymer and a synthetic polymer.

11. The cleaning device of claim 10 , wherein the cleaning material has the specific gravity in a range of 0.75 to 2.27, the modulus of elasticity in a range of 40-MPa to 600-MPa, the tackiness in a range of 20 to 800 grams, the thickness in a range between 25-μm and 500-μm, each layer has a hardness between 30 Shore A and 90 Shore A, and the porosity in a range of 10 to 150 micropores per inch.

12. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having a set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine, the set of microfeatures having a spacing, a moment of inertia and a total length of each microfeature determined based on at least a diameter of the vacuum inlet/outlet; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the contact element surface to transfer to the cleaning material.

13. A cleaning device, comprising:

a cleaning material attached to a substrate;

the cleaning material being a polymer and having set of microfeatures that are configured to clean a vacuum pickup tool and a vacuum inlet/outlet of the vacuum pickup tool of a pick and place machine and an array of streets, avenues or diagonals that decouple each microfeature from each other microfeature and a width of each street, avenue or diagonal is based on the vacuum inlet/outlet; and

wherein a top surface of the cleaning material has a surface tackiness that causes a piece of debris on the contact element surface to transfer to the cleaning material.