Absolute and differential pressure sensors and related methods
Implementations of absolute pressure sensor devices may include a microelectromechanical system (MEMS) absolute pressure sensor coupled over a controller die. The MEMS absolute pressure sensor may be mechanically coupled to the controller die and may also be configured to electrically couple with the controller die. A perimeter of the controller die may be one of the same size and larger than a perimeter of the MEMS absolute pressure sensor. The controller die may be configured to electrically couple with a module through an electrical connector.
1. A differential pressure sensor device comprising:
a pressure sensor coupled over an interposer configured to couple with a module, wherein the interposer comprises an opening therethrough providing fluid access to the pressure sensor; and
a die coupled over the interposer;
wherein the pressure sensor is configured to electrically couple with the die.
2. The device of claim 1 , wherein the die is configured to couple with the module through one of a wirebond, a stud, a bump, and a through-silicon-via.
3. The device of claim 1 , wherein the pressure sensor is electrically coupled with the die through a wirebond.
4. The device of claim 1 , wherein the pressure sensor is coupled to the interposer through a flip-chip coupling, wherein an encapsulant at least partially encapsulates a plurality of flip-chip bumps and provides a substantially fluid-tight seal between the pressure sensor and the interposer.
5. The device of claim 1 , wherein the die is coupled to the interposer through a flip-chip coupling.
6. The device of claim 1 , further comprising an encapsulant at least partially encapsulating the pressure sensor, the controller die, and the interposer.
7. The device of claim 1 , wherein the opening of the interposer is configured to align with an opening in the module.
8. A differential pressure sensor device comprising:
a pressure sensor coupled over a die, wherein the die comprises an opening therethrough providing fluid access to the pressure sensor;
wherein the pressure sensor is configured to electrically couple with the die; and
wherein the die is configured to electrically couple with a module through an electrical contact.
9. The device of claim 8 , wherein a perimeter of the die is not coextensive with a perimeter of the pressure sensor.
10. The device of claim 8 , wherein the pressure sensor is coupled to the die through a flip-chip coupling, wherein an encapsulant at least partially encapsulates a plurality of flip-chip bumps and provides a substantially fluid-tight seal between the pressure sensor and the die.
11. The device of claim 8 , wherein the pressure sensor is wirebonded to the die.
12. The device of claim 8 , further comprising an encapsulant at least partially encapsulating the pressure sensor and the die.
13. The device of claim 8 , wherein the die comprises one or more through-silicon-vias configured to electrically couple the die with the module.
14. A differential pressure sensor device comprising:
a microelectromechanical system (MEMS) sensor coupled to a carrier, the carrier coupled over an interposer, wherein the interposer comprises an opening therethrough providing fluid access to the MEMS sensor; and
a die coupled over the interposer;
wherein the die is configured to couple with the MEMS sensor.
15. The device of claim 14 , wherein the die is configured to couple with a module through one of a wirebond, a stud, a bump, and a through-silicon-via.
16. The device of claim 14 , wherein the die is electrically coupled with the MEMS sensor through a wirebond.
17. The device of claim 14 , wherein the MEMS sensor is coupled to the interposer through a flip-chip coupling, wherein an encapsulant at least partially encapsulates a plurality of flip-chip bumps and provides a substantially fluid-tight seal between the MEMS sensor and the interposer.
18. The device of claim 14 , wherein the die is coupled to the interposer through a flip-chip coupling.
19. The device of claim 14 , further comprising an encapsulant at least partially encapsulating the MEMS sensor, the die, and the interposer.
20. The device of claim 14 , wherein the opening of the interposer is configured to align with an opening in a module.