IP Library Granted Patent US 11,789,186
Granted Patent B1
US 11,789,186 · App. 17/216,038 · Granted Oct 17, 2023

Diffraction grating with a variable refractive index formed using an energy gradient

Inventors: Giuseppe Calafiore (Woodinville, WA); Austin Lane (Bellevue, WA); Matthew E. Colburn (Woodinville, WA)
Assignee: META PLATFORMS TECHNOLOGIES, LLC
G02B5/1857G02B6/34G03F7/0005
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Quick Facts
Patent No.
US 11,789,186
App. No.
17/216,038
Granted
Oct 17, 2023
Kind
B1
Abstract

An optical device with a variable index of refraction is formed by exposing a film to an energy gradient. The optical device has angular selectivity. The optical device can be used as an output coupler for a waveguide used in a virtual-reality and/or augmented-reality apparatus.

Claims (19)

1. A method of creating an optical device with a variable index of refraction for angular selectivity, the method comprising:

depositing a film on a substrate, wherein the film includes a block copolymer;

exposing the film to ultra-violet (UV) light using a gray-tone mask;

developing the film using a solvent to create a variable refractive index in the film; and

patterning the film to create an optical structure after developing the film.

2. The method of claim 1 , wherein depositing the film comprises:

spin-coating the film on the substrate; and

annealing the film to produce self-assembled block copolymer domains.

3. The method of claim 1 , wherein the film includes poly(styrene-block-methyl methacrylate) (PS-b-PMMA).

4. The method of claim 3 , wherein exposing the film to UV light decomposes poly(methyl methacrylate) (PMMA) blocks in the film.

5. The method of claim 3 , wherein developing the film using the solvent develops more PS-b-PMMA domains in areas of the film exposed to more UV light.

6. The method of claim 1 , wherein exposing the film to the UV light comprises exposing the film to UV light having a dose between 0.1 and 100 J/cm 2 .

7. The method of claim 1 , wherein the solvent includes acetic acid or isopropanol.

8. The method of claim 1 , wherein patterning the film comprises:

applying a photoresist to the film;

selectively exposing the photoresist;

partially removing the photoresist based on selectively exposing the photoresist; and

etching the film to create the optical structure.

9. The method of claim 1 , wherein the optical structure includes an optical grating.

Assignments (3)
CHANGE OF NAME Recorded May 19, 2022
From: FACEBOOK TECHNOLOGIES, LLC
To: META PLATFORMS TECHNOLOGIES, LLC
Reel/Frame 060130/0404 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2021
From: CALAFIORE, GIUSEPPE; LANE, AUSTIN; COLBURN, MATTHEW E.
To: FACEBOOK, INC.
Reel/Frame 055756/0622 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2021
From: FACEBOOK, INC.
To: FACEBOOK TECHNOLOGIES, LLC
Reel/Frame 055756/0689 →
Continuity (1)
Division 15878230 · Jan 23, 2018
Cited By (1)
US 12,710,579