IP Library Granted Patent US 11,398,247
Granted Patent B1
US 11,398,247 · App. 17/353,472 · Granted Jul 26, 2022

Magnetic recording media with oxidized pre-seed layer

Inventor: Kai Tang (San Jose, CA)
Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
G11B5/667G11B5/012G11B5/70615G11B5/70621
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Quick Facts
Patent No.
US 11,398,247
App. No.
17/353,472
Granted
Jul 26, 2022
Kind
B1
Abstract

Magnetic recording media including a soft magnetic underlayer (SUL) formed over an oxidized pre-seed layer. In some examples, the pre-seed layer is oxidized to reduce an amount of intermixing between the pre-seed layer and the SUL. The reduction in intermixing via oxidation can lead to improved recording performance of the recording media that are deposited on the SUL. In particular, media overwrite, signal-to-noise ratio (SNR), linear recording density, and areal recording density or areal density capacity (ADC) can be improved. In one aspect, a deposition apparatus may be modified to inject oxygen during pre-seed layer deposition to oxidize the pre-seed layer.

Claims (48)

1. A magnetic recording medium, comprising:

a substrate;

an oxidized pre-seed layer on the substrate;

a soft magnetic underlayer (SUL) on the oxidized pre-seed layer; and

at least one magnetic recording layer on the SUL,

wherein a percentage concentration of an oxidized metal within the pre-seed layer has a gradient within at least a top portion of the pre-seed layer with oxidation increasing toward the SUL.

2. The magnetic recording medium of claim 1 , wherein the substrate is made of a non-conductive material.

3. The magnetic recording medium of claim 1 , wherein the oxidized metal comprises one or more of oxidized CrTi or oxidized NiTa.

4. A magnetic recording medium, comprising:

a substrate;

an oxidized pre-seed layer on the substrate;

a soft magnetic underlayer (SUL) on the oxidized pre-seed layer; and

at least one magnetic recording layer on the SUL,

wherein a top portion of the pre-seed layer that is oxidized has a thickness in the range of 0.3 nanometers (nm) to 3 nm.

5. The magnetic recording medium of claim 1 , wherein a top portion of the pre-seed layer that is oxidized has an oxygen atomic percentage in the range of 40 to 80 (at %).

6. The magnetic recording medium of claim 1 , wherein at least one of: (1) a thickness of the oxidized metal within the pre-seed layer and (2) an oxygen concentration in the oxidized metal within the pre-seed layer is configured so that an areal density capacity (ADC) of the magnetic recording medium is at least 0.5% greater than an ADC for a corresponding magnetic recording medium with a pre-seed layer that is not oxidized.

7. The magnetic recording medium of claim 1 , wherein the SUL covers a surface portion of the pre-seed layer and wherein the surface portion covered by the SUL is oxidized.

8. The magnetic recording medium of claim 1 , wherein the SUL comprises a material selected from the group consisting of: cobalt, iron, molybdenum, tantalum, niobium, boron, chromium, and combinations thereof.

9. The magnetic recording medium of claim 1 , wherein the SUL is configured to provide a return path for a magnetic field applied to the magnetic recording medium during a write operation.

10. A magnetic recording device, comprising:

the magnetic recording medium of claim 1 ; and

a recording head configured to write information to the magnetic recording medium.

11. A method for fabricating a magnetic recording medium, comprising:

providing a substrate;

providing an oxidized pre-seed layer on the substrate;

providing a soft magnetic underlayer (SUL) on the oxidized pre-seed layer; and

providing at least one magnetic recording layer on the SUL,

wherein a percentage concentration of an oxidized metal within the pre-seed layer has a gradient within at least a top portion of the pre-seed layer with oxidation increasing toward the SUL.

12. The method of claim 11 , wherein the pre-seed layer is oxidized as the pre-seed layer is formed on the substrate.

13. The method of claim 11 , wherein the pre-seed layer is oxidized after the pre-seed layer is formed on the substrate and before the SUL is provided.

14. The method of claim 11 , wherein the substrate is made of a non-conductive material and the pre-seed layer comprises the oxidized metal.

15. The method of claim 14 , wherein at least one of: (1) a thickness of the oxidized metal within the pre-seed layer and (2) an oxygen concentration in the oxidized metal within the pre-seed layer is selected to reduce an amount of intermixing between the pre-seed layer and the SUL as compared to an amount of intermixing in a corresponding magnetic recording medium with a pre-seed layer that is not oxidized.

16. The method of claim 14 , wherein at least one of: (1) a thickness of the oxidized metal within the pre-seed layer and (2) an oxygen concentration in the oxidized metal within the pre-seed layer is selected to increase a measure of overwrite of the magnetic recording medium.

17. The method of claim 11 , wherein the SUL covers a surface portion of the pre-seed layer and wherein the surface portion covered by the SUL is oxidized.

18. The method of claim 11 , wherein the SUL comprises a material selected from the group consisting of: cobalt, iron, molybdenum, tantalum, niobium, boron, chromium, and combinations thereof.

19. The method of claim 11 , wherein the SUL is configured to provide a return path for a magnetic field applied to the magnetic recording medium during a write operation.

20. A magnetic recording medium, comprising:

a non-conducting substrate;

an oxidized metal pre-seed layer on the non-conducting substrate, wherein a top portion of the oxidized metal pre-seed layer has an oxygen atomic percentage in the range of 40 to 80 (at %);

a soft magnetic underlayer (SUL) on the oxidized metal pre-seed layer;

one or more intermediate layers on the SUL; and

at least one magnetic recording layer on the one or more intermediate layers.

21. A magnetic recording device, comprising:

the magnetic recording medium of claim 20 ; and

a recording head configured to write information to the magnetic recording medium.

22. The magnetic recording medium of claim 20 , wherein the oxidized metal pre-seed layer comprises one or more of oxidized CrTi or oxidized NiTa.

23. The magnetic recording medium of claim 20 , wherein the SUL covers a surface portion of the oxidized metal pre-seed layer and wherein the surface portion covered by the SUL is oxidized.

24. The magnetic recording medium of claim 20 , wherein the top portion of the pre-seed layer that is oxidized has a thickness in the range of 0.3 nanometers (nm) to 3 nm.

Assignments (5)
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
RELEASE OF SECURITY INTEREST AT REEL 057651 FRAME 0296 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058981/0958 →
SECURITY INTEREST Recorded Sep 17, 2021
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 057651/0296 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 21, 2021
From: TANG, KAI
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 056608/0777 →