IP Library Granted Patent US 11,631,814
Granted Patent B2
US 11,631,814 · App. 17/376,295 · Granted Apr 18, 2023

Two-dimensional carbon nanotube liquid crystal films for wafer-scale electronics

Inventors: Michael Scott Arnold (Middleton, WI); Katherine Rose Jinkins (Evanston, IL); Padma Gopalan (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
H01L51/0012H01L51/0003H01L51/0048H01L51/0545H01L51/0558
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Quick Facts
Patent No.
US 11,631,814
App. No.
17/376,295
Granted
Apr 18, 2023
Kind
B2
Abstract

Methods of forming films of aligned carbon nanotubes on a substrate surface are provided. The films are deposited from carbon nanotubes that have been concentrated and confined at a two-dimensional liquid/liquid interface. The liquid/liquid interface is formed by a dispersion of organic material-coated carbon nanotubes that flows over the surface of an immiscible liquid within a flow channel. Within the interface, the carbon nanotubes self-organize via liquid crystal phenomena and globally align along the liquid flow direction. By translating the interface across the substrate, large-area, wafer-scale films of aligned carbon nanotubes can be deposited on the surface of the substrate in a continuous and scalable process.

Claims (33)

1. A method of forming a film of aligned carbon nanotubes, the method comprising:

forming a liquid dispersion comprising organic material-coated carbon nanotubes dispersed in a first liquid;

forming a channel that is defined by:

a deposition wall;

a confining wall that is separated from the deposition substrate by a gap; and

a second liquid that is immiscible with the liquid dispersion spanning the gap between the deposition wall and the confining wall and providing a channel floor,

cooling the second liquid to a temperature of 15° C. or lower;

flowing the liquid dispersion of organic material-coated carbon nanotubes through the channel, over the cooled second liquid, to form an interface between the liquid dispersion of organic material-coated carbon nanotubes and the cooled second liquid, wherein the organic material-coated carbon nanotubes become concentrated at the interface and aligned within the interface along the flow direction; and

translating the deposition wall across the interface as the liquid dispersion of organic material-coated carbon nanotubes flows through the channel, whereby organic material-coated carbon nanotubes are deposited from the interface onto a surface of the deposition wall.

2. The method of claim 1 , wherein the temperature below ambient temperature is in the range from 15° C. to 1° C.

3. The method of claim 1 , wherein the temperature below ambient temperature is in the range from 12° C. to 5° C.

4. The method of claim 1 , wherein the concentration of carbon nanotubes in the liquid dispersion is in the range from 5 μg/mL to 200 μg/mL.

5. The method of claim 1 , wherein the concentration of carbon nanotubes in the liquid dispersion is in the range from 50 μg/mL to 150 μg/mL.

6. The method of claim 1 , wherein the liquid dispersion of organic material-coated carbon nanotubes has a flow rate in the range from 2 mL/min to 12 mL/min.

7. The method of claim 1 , wherein the surface of the deposition wall and the floor of the channel define a tilt angle in the range from 5° to 85°.

8. The method of claim 7 , wherein the surface of the deposition wall comprises silicon oxide.

9. The method of claim 8 , wherein the organic material is a poly(9,9-dialkyl-fluorene) derivative or a poly(phenyl vinylene) derivative.

10. The method of claim 1 , wherein the liquid dispersion is a non-aqueous liquid dispersion and the second liquid is an aqueous liquid.

11. A method of forming a film of aligned carbon nanotubes, the method comprising:

forming a liquid dispersion comprising organic material-coated carbon nanotubes dispersed in a first liquid;

forming a channel that is defined by:

a deposition wall;

a confining wall that is separated from the deposition substrate by a gap; and

a second liquid that is immiscible with the liquid dispersion spanning the gap between the deposition wall and the confining wall and providing a channel floor, wherein the deposition wall and the floor of the channel define a tilt angle in the range from 5° to 85°,

flowing the liquid dispersion of organic material-coated carbon nanotubes through the channel, over the second liquid, to form an interface between the liquid dispersion of organic material-coated carbon nanotubes and the second liquid, wherein the organic material-coated carbon nanotubes become concentrated at the interface and aligned within the interface along the flow direction; and

translating the deposition wall across the interface as the liquid dispersion of organic-material coated carbon nanotubes flows through the channel, whereby organic material-coated carbon nanotubes are deposited from the interface onto the deposition wall.

12. The method of claim 11 , wherein the deposition wall and the floor of the channel define a tilt angle in the range from 15° to 60°.

13. The method of claim 11 , wherein the concentration of carbon nanotubes in the liquid dispersion is in the range from 5 μg/mL to 200 μg/mL.

14. The method of claim 11 , wherein the concentration of carbon nanotubes in the liquid dispersion is in the range from 50 μg/mL to 150 μg/mL.

15. The method of claim 11 , wherein the liquid dispersion of organic material-coated carbon nanotubes has a flow rate in the range from 2 mL/min to 12 mL/min.

16. The method of claim 11 , wherein the surface of the deposition wall comprises silicon oxide.

17. The method of claim 11 , wherein the organic material is a poly(9,9-dialkyl-fluorene) derivative or a poly(phenyl vinylene) derivative.

18. The method of claim 11 , wherein the liquid dispersion is a non-aqueous liquid dispersion and the second liquid is an aqueous liquid.

Assignments (2)
CONFIRMATORY LICENSE Recorded May 20, 2024
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 067464/0804 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 2, 2023
From: ARNOLD, MICHAEL; JINKINS, KATHERINE; GOPALAN, PADMA
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 062568/0595 →
Continuity (1)
Related Publication 20230028346A1 · Jan 26, 2023