Manufacturing method for gas sensor element, gas sensor element, and gas sensor
A method for manufacturing a gas sensor element ( 100 ) including a solid electrolyte ( 110 ) and an electrode ( 130 ) formed on a surface ( 110 a ) of the solid electrolyte ( 110 ). The method includes: a slurry application step S 3 of forming a first slurry layer ( 13 ) by applying a first slurry containing monoclinic zirconia and tetragonal/cubic zirconia to the surface ( 110 a ) of the solid electrolyte ( 110 ); a heat treatment step S 4 of forming a base layer ( 14 ) by a heat treating the solid electrolyte ( 110 ) having the first slurry layer ( 13 ) formed thereon; and a plating step S 5 of forming the electrode ( 130 ) by plating the base layer ( 14 ) using a plating solution containing a noble metal.
1 . A gas sensor element comprising a solid electrolyte and an electrode formed on a surface of the solid electrolyte, wherein
the electrode contains monoclinic zirconia, tetragonal/cubic zirconia, and a noble metal,
the electrode is a single layer electrode,
the noble metal is contained in a proportion of 85 mass % or less with respect to a total mass of the electrode, and
a content of the monoclinic zirconia in the single layer electrode is not less than 40 mass % and not greater than 90 mass % with respect to 100 mass % of a total amount of the monoclinic zirconia and the tetragonal/cubic zirconia.
2 . A gas sensor comprising:
the gas sensor element according to claim 1 ; and
a metal shell holding the gas sensor element.
3 . A method for manufacturing a gas sensor element according to claim 1 , the method comprising:
a slurry application step of forming a first slurry layer by applying a first slurry containing monoclinic zirconia and tetragonal/cubic zirconia to the surface of the solid electrolyte;
a heat treatment step of forming a base layer by heat treating the solid electrolyte having the first slurry layer formed thereon; and
a plating step of forming the electrode by plating the base layer using a plating solution containing a noble metal,
wherein the electrode is a single layer electrode,
the noble metal is contained in a proportion of 85 mass % or less with respect to a total mass of the electrode,
a content of the monoclinic zirconia in the single layer electrode is not less than 40 mass % and not greater than 90 mass % with respect to 100 mass % of a total amount of the monoclinic zirconia and the tetragonal/cubic zirconia.
4 . The method for manufacturing the gas sensor element as claimed in claim 3 , wherein the content of the monoclinic zirconia in the first slurry is not less than 40 mass % and not greater than 70 mass % with respect to 100 mass % of the total amount of the monoclinic zirconia and the tetragonal/cubic zirconia.
5 . A method for manufacturing a gas sensor element according to claim 1 , the method comprising:
a slurry application step of forming a second slurry layer by applying a second slurry containing monoclinic zirconia, tetragonal/cubic zirconia, and a noble metal to the surface of the solid electrolyte; and
a heat treatment step of forming the electrode by heat treating the solid electrolyte having the second slurry layer formed thereon,
wherein the electrode is a single layer electrode, and
the noble metal is contained in a proportion of 85 mass % or less with respect to a total mass of the electrode, and
a content of the monoclinic zirconia in the second slurry is not less than 40 mass % and not greater than 90 mass % with respect to 100 mass % of a total amount of the monoclinic zirconia and the tetragonal/cubic zirconia.
6 . The method for manufacturing the gas sensor element as claimed in claim 5 , wherein the content of the monoclinic zirconia in the second slurry is not less than 40 mass % and not greater than 70 mass % with respect to 100 mass % of the total amount of the monoclinic zirconia and the tetragonal/cubic zirconia.