Granted Patent
Utility
PCT National Stage
US 12,566,406
· Confirmation No. 3926
DARK FIELD DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD
Applicant:
ASML NETHERLANDS B.V.
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| 2026-03-09 | MFEE.C.AD |
Maintenance Fee Address Change | 1 | View | |
| 2026-03-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-03-03 | EGRANT.PDF |
Digitally signed official patent eGrant document | — | View | |
| 2026-03-03 | EGRANT.NTF |
eGrant day-of Notification | 2 | View | |
| 2026-02-18 | ISSUE.NTF |
Issue Notification | 2 | View | |
| 2026-01-30 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2026-01-30 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2026-01-30 | N427 |
Post Allowance Communication - Incoming | 3 | View | |
| 2026-01-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-12-02 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2025-12-02 | SRNT |
Examiner's search strategy and results | 20 | View | |
| 2025-12-02 | 1449 |
List of References cited by applicant and considered by examiner | 5 | View | |
| 2025-11-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 12 | View | |
| 2025-11-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2025-11-18 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2025-11-18 | FWCLM |
Index of Claims | 1 | View | |
| 2025-11-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 3 | View | |
| 2025-11-18 | SRNT |
Examiner's search strategy and results | 20 | View | |
| 2025-11-18 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2025-11-18 | SRNT |
Examiner's search strategy and results | 12 | View | |
| 2025-11-18 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2025-11-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2025-11-06 | FOR |
Foreign Reference | 42 | View | |
| 2025-11-06 | FOR |
Foreign Reference | 25 | View | |
| 2025-11-06 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 8 | View | |
| 2025-11-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-07-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | — | View | |
| 2025-07-16 | XT/ |
Extension of Time | 2 | View | |
| 2025-07-16 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-07-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-07-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2025-07-16 | CLM |
Claims | 5 | View | |
| 2025-07-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2025-07-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-02-13 | CTNF |
Non-Final Rejection | 15 | View | |
| 2025-02-13 | 892 |
List of references cited by examiner | 1 | View | |
| 2025-02-13 | FWCLM |
Index of Claims | 1 | View | |
| 2025-02-13 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2025-02-13 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2025-02-13 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2024-08-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-08-14 | OATH |
Oath or Declaration filed | 4 | View | |
| 2023-10-26 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2023-06-30 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2023-06-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-06-30 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2023-06-30 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2023-06-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-04-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2023-04-27 | FOR |
Foreign Reference | 39 | View | |
| 2023-04-27 | FOR |
Foreign Reference | 28 | View | |
| 2023-04-27 | FOR |
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| 2023-04-27 | FOR |
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| 2023-04-27 | FOR |
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| 2023-04-27 | FOR |
Foreign Reference | 34 | View | |
| 2023-04-27 | FOR |
Foreign Reference | 81 | View | |
| 2023-04-27 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 12 | View | |
| 2023-04-27 | FOR |
Foreign Reference | 50 | View | |
| 2023-04-27 | FOR |
Foreign Reference | 54 | View | |
| 2023-04-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-04-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 8 | View | |
| 2023-04-27 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 1 | View | |
| 2023-04-27 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2023-04-27 | TRNA |
Transmittal of New Application | 3 | View | |
| 2023-04-27 | ADS |
Application Data Sheet | 4 | View | |
| 2023-04-27 | OATH |
Oath or Declaration filed | 4 | View | |
| 2023-04-27 | A.PE |
Preliminary Amendment | 1 | View | |
| 2023-04-27 | SPEC |
Specification | 2 | View | |
| 2023-04-27 | CLM |
Claims | 5 | View | |
| 2023-04-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2023-04-27 | ABST |
Abstract | 1 | View | |
| 2023-04-27 | 371P |
Documents submitted with 371 (National Stage) Applications | 3 | View | |
| 2023-04-27 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2023-04-27 | 371P |
Documents submitted with 371 (National Stage) Applications | 29 | View | |
| 2023-04-27 | CLM |
Claims | 3 | View | |
| 2023-04-27 | P.N.101.CONV |
PCT/RO/101 - Request form for new International Application - Conventional | 5 | View | |
| 2023-04-27 | ABST |
Abstract | 1 | View | |
| 2023-04-27 | SPEC |
Specification | 28 | View |
Inventors
Nitesh PANDEY
San Jose, CA
Arie Jeffrey DEN BOEF
Waalre, NETHERLANDS
Hugo Augustinus Joseph CRAMER
Eindhoven, NETHERLANDS
Vasco Tomas TENNER
Eindhoven, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
356/457
G03H1/0443
G03F7/70616
G03H1/0465
G03H1/0486
G03H1/265
G03H2001/0033
G03H2001/0038
G03H2001/005
G03H2001/0445
G03H2001/0456
G03H2001/0473
G03H2222/10
G03H2222/14
G03H2222/22
G03H2222/23
G03H2222/24
G03H2222/35
G03H2222/42
G03H2222/56
G03H2223/15
G03H2223/17
G03H2223/23
G03H2223/26
G03H2240/50
Prosecution
- Examiner
- UNDERWOOD, JARREAS C
- Art Unit
- 2877
- Customer No.
- 909
- Docket No.
- 081468-0575136
- Confirmation No.
- 3926
Foreign Priority
20207848.1
·
2020-11-16
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20230341813A1
- Pub. Date
- 2023-10-26
Patent Term Adjustment
-177days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2023-04-27
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Quick Facts
- Patent No.
- US 12,566,406
- App. No.
- 18/034,356
- Filed
- 2023-04-27
- Granted
- 2026-03-03
- Pub. No.
- US20230341813A1
- Examiner
- UNDERWOOD, JARREAS C
- Art Unit
- 2877
- PTA
- -177 days
External Links