IP Library › Patent Application 18920791
Patent Application
App. No. 18/920,791

ACCURATE RAMAN SPECTROSCOPY

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Quick Facts
Patent No.
US None
App. No.
18/920,791
Abstract

An optical measurement system, the optical measurement system comprises optics, wherein the optics include a collection path and an illumination path and an objective lens. The optics is configured to acquire Raman spectrums of one or more structural elements located at a measurement site of the sample while being set-up to apply one or more optics parameters that comprise an illumination angle out of a set of multiple illumination angles that correspond to a numerical aperture of the objective lens. Each of the one or more structural elements has a dimension that ranges between one tenth of nanometer to one hundred microns; an optical spectrometer; a Raman detector that is downstream to the optical spectrometer; and a control unit that is configured to determine an expected radiation pattern to be detected by the Raman detector when the optics are set-up to apply the one or more optics parameters.

Claims (22)

1 . An optical measurement system, the optical measurement system comprises:

optics, wherein the optics comprise a collection path and an illumination path and an objective lens, the optics is configured to acquire Raman spectrums of one or more structural elements located at a measurement site of the sample while being set-up to apply one or more optics parameters that comprise an illumination angle out of a set of multiple illumination angles that correspond to a numerical aperture of the objective lens; wherein each of the one or more structural elements has a dimension that ranges between one tenth of nanometer to one hundred microns;

an optical spectrometer;

a Raman detector that is downstream to the optical spectrometer;

and

a control unit that is configured to determine an expected radiation pattern to be detected by the Raman detector when the optics are set-up to apply the one or more optics parameters.

2 . The optical measurement system according to claim 1 wherein the control unit is further configured to calibrate the optics.

3 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a polarization of the illumination path.

4 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a polarization of the collection path.

5 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a collection angle within the numerical aperture of the objective lens.

6 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a configuration of an adjustable spatial filter of the illumination path.

7 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a configuration of an adjustable spatial filter of the collection path.

8 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a rotation of a rotatable dove prism located upstream to the Raman detector.

9 . The optical measurement system according to claim 1 wherein the one or more optical parameters further comprise a position of a mirror of the illumination path.

10 . A method for optical measurement, the method comprising:

acquiring, by an optical measurement system that comprises optics, an optical spectrometer and a Raman detector, Raman spectrums of multiple sites of the sample while applying one or more optics parameters; wherein the optics comprises a collection path and an illumination path that comprises a plurality of lasers, wherein the one or more optics parameters comprise at least one of a polarization parameter, a spatial filtering parameter, and an illumination parameter; wherein the Raman detectors downstream to the optical spectrometer;

controlling, by a control unit of the optical measurement system, calibration process; and

setting, by the control unit, the one or more optics parameters based on at an outcome of a calibration process, the calibration process comprises analyzing one or more Raman spectra; wherein the one or more optical parameters comprise an identity of a laser of the plurality of lasers.

11 . A non-transitory computer readable medium for optical measurement, the non-transitory computer readable medium stores instructions for:

acquiring, by an optical measurement system that comprises optics, an optical spectrometer and a Raman detector, Raman spectrums of multiple sites of the sample while applying one or more optics parameters; wherein the optics comprises a collection path and an illumination path that comprises a plurality of lasers, wherein the one or more optics parameters comprise at least one of a polarization parameter, a spatial filtering parameter, and an illumination parameter; wherein the Raman detectors downstream to the optical spectrometer;

controlling, by a control unit of the optical measurement system, calibration process; and

setting, by the control unit, the one or more optics parameters based on at an outcome of a calibration process, the calibration process comprises analyzing one or more Raman spectra; wherein the one or more optical parameters comprise an identity of a laser of the plurality of lasers.