DETECTING MICROCRACKS IN A SEMICONDUCTOR DIE
A microcrack detection system detects cracks and/or microcracks within a semiconductor die and/or within a semiconductor package. The microcrack detection system applies an electrical current to the semiconductor die. The electrical current causes a temperature of the semiconductor die to increase. One or more thermal sensors are used to determine a thermal profile of the semiconductor die. The thermal profile is analyzed to determine whether cracks or defects exist within the semiconductor die.
1 . A method, comprising:
applying an electrical current to a semiconductor die;
thermally scanning an area of the semiconductor die for one or more thermal variations;
generating a heat map based, at least in part, on the one or more thermal variations;
analyzing the heat map to determine whether any of the one or more thermal variations exceeds a thermal variation threshold; and
identifying a microcrack based, at least in part, on a determination that at least one thermal variation exceeds the thermal variation threshold.
2 . The method of claim 1 , wherein applying the electrical current to the semiconductor die comprises:
positioning a plurality of probes on the semiconductor die; and
providing the electrical current to the plurality of probes.
3 . The method of claim 2 , wherein positioning the plurality of probes on the semiconductor die comprises positioning a first probe of the plurality of probes at a first location on the semiconductor die and positioning a second probe of the plurality of probes at a second location on the semiconductor die, the second location being different than the first location.
4 . The method of claim 3 , wherein the first location comprises a corner of the semiconductor die and the second location comprises a center of the semiconductor die.
5 . The method of claim 2 , wherein the electrical current is in a range between ten microamps (μA) and one hundred μA.
6 . The method of claim 1 , wherein the thermal variations are identified based, at least in part, by comparing a temperature reading to a baseline temperature.
7 . The method of claim 1 , wherein thermally scanning the area of the semiconductor die for the one or more thermal variations comprises:
positioning at least one thermal sensor above the semiconductor die;
causing the thermal sensor to scan the area; and
collecting thermal data across the scanning area.
8 . The method of claim 1 , wherein applying the electrical current to the semiconductor die comprises applying the electrical current to a connector associated with the semiconductor die.
9 . The method of claim 1 , wherein the thermal scanning is complete in four seconds or less.
10 . A method, comprising:
positioning a plurality of probes on at least one semiconductor die;
providing an electrical current through the plurality of probes to induce localized heating of the at least one semiconductor die;
removing the plurality of probes from the at least one semiconductor die;
scanning a scanning area of the at least one semiconductor die to collect thermal data associated with the scanning area;
generating a heat map based, at least in part, on the thermal data; and
analyzing the heat map to detect thermal variations that exceed a thermal variation threshold value to detect a microcrack.
11 . The method of claim 10 , wherein generating the heat map comprises generating a visual representation of the collected thermal data with a precision of five microns.
12 . The method of claim 11 , wherein the precision of five microns facilitates detection of internal cracks as small as ten microns.
13 . The method of claim 10 , wherein the electrical current is in a range between ten microamps (μA) and one hundred μA.
14 . The method of claim 10 , wherein the thermal variations are identified based, at least in part, by comparing a temperature reading to a baseline temperature.
15 . The method of claim 10 , wherein positioning the plurality of probes on the at least one semiconductor die comprises positioning a first probe of the plurality of probes proximate an edge of the at least one semiconductor die and positioning a second probe of the plurality of probes proximate a center of the at least one semiconductor die.
16 . A system, comprising:
means for inducing localized heating of a semiconductor die;
means for measuring a surface temperature the semiconductor die;
means for generating a heat map based, at least in part, on the surface temperature of the semiconductor die; and
means for analyzing the heat map to detect a crack within the at least one memory die.
17 . The system of claim 16 , wherein the means for inducing localized heating of the semiconductor die comprise a plurality of conductive probes.
18 . The system of claim 16 , wherein the means for measuring the surface temperature of the semiconductor die comprise at least one thermal sensor.
19 . The system of claim 16 , wherein the means for analyzing the heat map to detect a crack within the semiconductor die detects cracks as small as ten microns.
20 . The system of claim 16 , wherein the crack is detected based, at least in part, on a comparison between a temperature reading of an area of the semiconductor die to a baseline temperature.