PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
Provided is an efficient and effective process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides the organotin compounds in a highly pure crystalline form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.
1 . A compound of Formula (I):
wherein each R is the same or different and is a C 1 -C 4 alkyl group and R 1 is a substituted or unsubstituted saturated or unsaturated linear or branched C 1 -C 5 group substituted with at least one fluorine atom.
2 . The compound of claim 1 , wherein each R is independently a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, or sec-butyl group.
3 . The compound of claim 1 , wherein each R is a methyl group.
4 . The compound of claim 1 , wherein R 1 is a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, sec-butyl, n-pentyl, iso-pentyl, or neopentyl group substituted with at least one fluorine atom.
5 . The compound of claim 1 , wherein R 1 is completely substituted with fluorine atoms.
6 . The compound of claim 1 , wherein the compound is dissolved in a non-polar solvent.
7 . The compound of claim 1 , wherein the compound is F 3 CSn(NMe 2 ) 3 .
8 . The compound of claim 1 , wherein the compound is F 3 CCH 2 Sn(NMe 2 ) 3 .
9 . A process for preparing a monoalkyl tris(dialkylamido) tin compound of Formula (I):
wherein each R is the same or different and is a C 1 -C 4 alkyl group and R 1 is a fluorine-substituted, linear C 1 -C 5 group; wherein the process comprises:
contacting a compound of Formula (A)
with a compound of Formula R 1 -X, wherein X is bromo, iodo, or chloro.
10 . The process of claim 9 , wherein each R is independently a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, or sec-butyl group.
11 . The process of claim 9 , wherein each R is a methyl group.
12 . The process of claim 9 , wherein the process is conducted in a non-polar aprotic solvent.
13 . The process of claim 9 , wherein the process is conducted in one reaction vessel.
14 . The process of claim 9 , wherein the compound of Formula (I) is F 3 CSn(NMe 2 ) 3 .
15 . The process of claim 9 , wherein the compound of Formula (I) is F 3 CCH 2 S (NMe 2 ) 3 .