Patent Application
Provisional
App. No. 63/196,472
· Confirmation No. 1022
Light-Enhanced Ozone Wafer Processing System and Method of Use
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-10 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2021-06-03 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2021-06-03 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2021-06-03 | SPEC |
Specification | 14 | View | |
| 2021-06-03 | CLM |
Claims | 3 | View | |
| 2021-06-03 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2021-06-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-06-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Jens Fittkau
Berlin, GERMANY
Christiane Le Tiec
Berlin, GERMANY
Curt Rettig
Santa Clara, CA
Dirk Nolte
Berlin, GERMANY
Kay Mittler
Berlin, GERMANY
Carsten Becher
Berlin, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- 0233-800BER-21P
- Confirmation No.
- 1022
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/196,472
- Filed
- 2021-06-03
External Links