Patent Assignment
Reel/Frame 005052/0867
Assignment of Assignors Interest.
Recorded: 1989-03-08
Pages: 1
Assignors
SYVERSON, DANIEL J.
Executed: 1989-02-20
NOVAK, RICHARD E.
Executed: 1989-02-20
HAAK, EUGENE L.
Executed: 1989-02-20
Assignee
FSI INTERNATIONAL, INC.,
322 LAKE HAZELTINE DRIVE,, JONATHAN INDUSTRIAL CENTER, A MN CORP., CHASKA,, MINNESOTA, 55318
Covered Property
(1)
Etch Chamber with Gas Dispersing Membrane
Patent:
5,458,724 →
Application:
07/320,494 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.