Patent Assignment
Reel/Frame 005124/0076
Assignment of Assignors Interest.
Recorded: 1989-08-21
Pages: 2
Assignee
FSI INTERNATIONAL, INC.
322 LAKE HAZELTINE DRIVE, CHASKA, MINNESOTA, 55318-1096
Covered Property
(1)
High Frequency Sonic Substrate Processing Module
Patent:
5,017,236 →
Application:
07/396,116 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.