Patent Assignment
Reel/Frame 005225/0681
Assignment of Assignors Interest.
Recorded: 1990-01-26
Pages: 2
Assignors
BIGGERSTAFF, REX L.
Executed: 1990-01-24
SKINNER, CHARLES W.
Executed: 1990-01-24
SYVERSON, DANIEL J.
Executed: 1990-01-24
JENSON, MARK L.
Executed: 1990-01-24
KEGLEY, JAMES G.
Executed: 1990-01-24
Assignee
FSI INTERNATIONAL, INC., A CORP. OF MN
322 LAKE HAZELTINE DRIVE, JONATHAN INDUSTRIAL CENTER, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Apparatus for Wafer Processing with Insitu Rinse
Patent:
5,169,408 →
Application:
07/470,871 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.