Patent Assignment
Reel/Frame 005473/0794
Assignment of Assignors Interest.
Recorded: 1990-09-28
Pages: 2
Assignee
GASONICS, INC., A CORP OF CA
2730 JUNCTION AVENUE, SAN JOSE, CALIFORNIA, 95135
Covered Property
(1)
Method and Apparatus for Batch Processing a Semiconductor Wafer
Patent:
5,167,716 →
Application:
07/590,402 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.