Patent Assignment
Reel/Frame 012698/0994
Assignment of Assignor's Interest
Recorded: 2002-03-18
Pages: 5
Assignor
GASONICS INTERNATIONAL CORPORATION
Executed: 2001-12-18
Assignee
NOVELLUS SYSTEMS, INC.
LEGAL DEPARTMENT / ROLAND TSO, 4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Properties
(15)
Apparatus and Method for Processing a Semiconductor Wafer
Patent:
5,167,717 →
Application:
07/311,686 →
Method and Apparatus for Batch Processing a Semiconductor Wafer
Patent:
5,167,716 →
Application:
07/590,402 →
Method for Processing a Semiconductor Wafer
Patent:
5,314,846 →
Application:
07/943,996 →
Apparatus and Method for Generating Steam
Patent:
5,467,424 →
Application:
08/273,570 →
Process Chamber Sleeve with Ring Seals for Isolating Individual Process Modules in a Common Cluster
Patent:
5,667,592 →
Application:
08/633,365 →
Modular Gas Box System
Patent:
5,662,143 →
Application:
08/648,771 →
Backside Etch Process Chamber and Method
Patent:
5,914,278 →
Application:
08/788,601 →
Short-Coupled-Path Extender for Plasma Source
Patent:
5,814,154 →
Application:
08/788,602 →
Ultra Thin Oxynitride and Nitride/Oxide Stacked Gate Dielectrics Fabricated by High Pressure Technology
Patent:
6,228,779 →
Application:
09/187,247 →
Energy Transfer Microwave Plasma Source
Patent:
6,211,621 →
Application:
09/272,689 →
Resonant Impedance-Matching Slow-Wave Ring Structure Microwave Applicator for Plasmas
Patent:
6,175,095 →
Application:
09/272,690 →
Wafer Transfer Device and Method
Patent:
6,190,103 →
Application:
09/282,525 →
End Effector
Patent:
6,183,026 →
Application:
09/287,325 →
Method and Apparatus for Removing Post-Etch Residues and Other Adherent Matrices
Patent:
6,228,563 →
Application:
09/397,956 →
Method and apparatus for removing post-etch residues and other adherent matrices
Patent:
6,333,268 →
Application:
09/630,231 →
Related Assignments
(15)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
Feb 15, 1989
From: BOITNOTT, CHARLES
To: ATOMEL PRODUCTS CORPORATION
Reel/Frame 005045/0182 →
Change of Name Effective March 27, 1989 (California)
Apr 3, 1990
From: ATOMEL PRODUCTS CORPORATION
To: GASONICS, INC.
Reel/Frame 005270/0006 →
Assignment of Assignors Interest.
Sep 28, 1990
From: BOITNOTT, CHARLES A.; TOOLE, MONTE M.
To: GASONICS, INC., A CORP OF CA
Reel/Frame 005473/0794 →
Assignment of Assignor's Interest
Apr 16, 1996
From: BOITNOTT, CHARLES E.; CAUGHRAN, JAMES W.; EGBERT, STEVE
To: GASONICS INTERNATIONAL
Reel/Frame 007940/0723 →
Assignment of Assignor's Interest
May 16, 1996
From: CAUGHRAN, JAMES W.
To: GASONICS INTERNATIONAL; MKS INSTRUMENTS, INC.
Reel/Frame 008029/0176 →
Assignment of Assignor's Interest
Jan 23, 1997
From: BOITNOTT, CHARLES A.; SHEPHERD, ROBERT A., JR.
To: GASONICS INTERNATIONAL
Reel/Frame 008464/0282 →
Assignment of Assignor's Interest
Jan 23, 1997
From: BOITNOTT, CHARLES A.
To: GASONICS INTERNATIONAL
Reel/Frame 008403/0211 →
Assignment of Assignor's Interest
Feb 1, 1999
From: BLOOM, JOHN A.; KWONG, DIM-LEE; EVANS, ROBERT K.; ACKER, BRUCE T.
To: GASONICS INTERNATIONAL
Reel/Frame 009755/0805 →
Assignment of Assignor's Interest
Mar 18, 1999
From: CAUGHRAN, JAMES W.; WHITE, TERRY L.; NAGAL, DANIEL G.; LUEE, SIDNEY HUNG
To: GASONICS INTERNATIONAL
Reel/Frame 009849/0129 →
Assignment of Assignor's Interest
Mar 18, 1999
From: MACDONALD, NILES K.; WHITE, TERRY L.; CAUGHRAN, JAMES W.
To: GASONICS INTERNATIONAL
Reel/Frame 009849/0121 →
Assignment of Assignor's Interest
Apr 7, 1999
From: CAI, LIHONG; MACDONALD, DOUGLAS
To: GASONICS INTERNATIONAL CORPORATION
Reel/Frame 009880/0081 →
Assignment of Assignor's Interest
Jun 10, 1999
From: EREZ, SHMUEL; BASHA, SYED S.; HAJJARIAN, ART
To: GASONICS INTERNATIONAL CORPORATION
Reel/Frame 010011/0091 →
Assignment of Assignor's Interest
Feb 15, 2000
From: EREZ, SHMUEL; BASHA, SYED S.; SHIMANOVICH, ARKADIY I.; VELLANKI, RAVI
To: GASONICS INTERNATIONAL CORPORATION
Reel/Frame 010650/0595 →
Assignment of Assignor's Interest
Mar 9, 2001
From: GASONICS INTERNATIONAL CORPORATION
To: NOVELLUS SYSTEMS, INC.
Reel/Frame 011576/0984 →
Release of Security Interest
Jan 29, 2003
From: FLEET CAPITAL CORPORATION
To: TREK DIAGNOSTIC SYSTEMS, INC.
Reel/Frame 013691/0881 →