Granted Patent
Utility
US 5,662,143 · App. 08/648,771
Modular gas box system
Inventor:
James W. Caughran
Patented Case
View Patent ↗
Granted: Sep 2, 1997
Filed: May 16, 1996
Inventor
James W. Caughran
Assignees (at issue)
Gasonics International Corporation
MKS Instruments, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.