IP Library › Granted Patent US 5,914,278
Granted Patent Utility
US 5,914,278 · App. 08/788,601

Backside etch process chamber and method

Inventors: Charles A. Boitnott, Robert Shepherd
Patented Case View Patent ↗
Granted: Jun 22, 1999 Filed: Jan 23, 1997
Inventors
Charles A. Boitnott
Robert Shepherd
Assignee (at issue)
Gasonics International Corporation

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Quick Facts
Patent No.
US 5,914,278
App. No.
08/788,601
Filed
1997-01-23
Granted
1999-06-22
Kind
A