Patent Assignment
Reel/Frame 008464/0282
Assignment of Assignor's Interest
Recorded: 1997-01-23
Pages: 2
Assignee
GASONICS INTERNATIONAL
2730 JUNCTION AVENUE, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Backside Etch Process Chamber and Method
Patent:
5,914,278 →
Application:
08/788,601 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.