Patent Assignment
Reel/Frame 006564/0531
Assignment of Assignor's Interest
Recorded: 1993-04-29
Pages: 2
Assignor
SATO, AKIRA
Executed: 1993-04-06
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Cvd Apparatus for Manufacturing a Semiconductor Device
Patent:
5,522,935 →
Application:
08/024,226 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.