Patent Assignment
Reel/Frame 007552/0558
Assignment of Assignor's Interest
Recorded: 1995-06-15
Pages: 2
Assignors
NAKAJIMA, KAZUO
Executed: 1995-05-12
TANAKA, KATSUNORI
Executed: 1995-05-15
OGAMI, NOBUTOSHI
Executed: 1995-05-24
Assignee
DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Concentration Controlling Method and a Substrate Treating Apparatus Utilizing Same
Patent:
5,715,173 →
Application:
08/490,830 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.