IP Library › Assignment 035248/0483
Patent Assignment
Reel/Frame 035248/0483

Change of Name

Recorded: 2015-03-12 Pages: 24
Assignor
DAINIPPON SCREEN MFG. CO., LTD.
Executed: 2014-10-01
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Properties (328)
Immersion-Type Apparatus for Processing Substrates
Patent: 5,540,247 →
Application: 08/349,446 →
Method and Apparatus for Measuring Insulation Film Thickness of Semiconductor Wafer
Patent: 5,568,252 →
Application: 08/363,535 →
Method of and Apparaus for Preventing Forgery of Specific Image
Patent: 5,565,962 →
Application: 08/368,110 →
Method and Apparatus for Simulating Color Print
Patent: 5,596,425 →
Application: 08/393,331 →
Substrate Processing Apparatus and Method
Patent: 5,668,733 →
Application: 08/417,800 →
Substrate Processing Apparatus and Method
Patent: 5,687,085 →
Application: 08/418,512 →
Apparatus and Method for Electrical Measurement of Semiconductor Wafers
Patent: 5,504,437 →
Application: 08/460,053 →
Processing Apparatus Having Parts for Thermal and Non-Thermal Treatment of Substrates
Patent: 5,639,301 →
Application: 08/461,066 →
Apparatus for Coating Substrate
Patent: 5,688,324 →
Application: 08/464,080 →
Concentration Controlling Method and a Substrate Treating Apparatus Utilizing Same
Patent: 5,715,173 →
Application: 08/490,830 →
Apparatus for Cleaning Substrates and Methods for Attaching/Detaching and Cleaning Brushes of Such Apparatus
Patent: 5,647,083 →
Application: 08/495,216 →
Substrate Spin Cleaning Apparatus
Patent: 5,829,087 →
Application: 08/529,832 →
Substrate Holder
Patent: 5,704,493 →
Application: 08/578,860 →
Substrate Processing Device and Method for Substrate from the Substrate Processing Device
Patent: 5,823,736 →
Application: 08/610,712 →
Method and Apparatus for Changing Specified Color in a Color Image
Patent: 5,719,639 →
Application: 08/619,887 →
Substrate Spin Cleaning Apparatus
Patent: 5,860,178 →
Application: 08/625,644 →
Optical Device Using a Point Light Source
Patent: 5,859,721 →
Application: 08/630,488 →
Image Recording Apparatus Capable of Adjusting an Image Recording Speed
Patent: 5,801,740 →
Application: 08/635,307 →
Substrate Spin Treating Method and Apparatus
Patent: 5,853,483 →
Application: 08/644,376 →
Substrate Spin Cleaning Apparatus
Patent: 5,785,068 →
Application: 08/646,131 →
Substrate Trandfer and Bath Apparatus
Patent: 5,976,198 →
Application: 08/659,687 →
Ultraviolet Irradiator for Substrate, Substrate Treatment System, and Method of Irradiating Substrate with Ultraviolet Light
Patent: 5,763,892 →
Application: 08/665,474 →
Apparatus for Removing Liquid from Substrates
Patent: 5,762,749 →
Application: 08/677,924 →
System for Engraving a Plurality of Gravure Rolls
Patent: 5,822,078 →
Application: 08/682,881 →
Substrate Container Cassette, Interface Mechanism, and Substrate Processing
Patent: 5,841,515 →
Application: 08/688,749 →
Substrate Spin Treating Method and Apparatus
Patent: 5,677,000 →
Application: 08/699,728 →
Substrate Transfer Method and Interface Apparatus
Patent: 5,788,868 →
Application: 08/704,261 →
Method for Preparing Multi-Composed Images Without Use of a Photo- Composer
Patent: 5,879,841 →
Application: 08/707,647 →
Method of Correcting Curvature of Image Surface and Optical Beam Scanning Apparatus for Use with the Same
Patent: 5,808,774 →
Application: 08/715,547 →
Substrate Processing Apparatus
Patent: 5,701,627 →
Application: 08/720,317 →
Substrate Developing Method and Apparatus
Patent: 6,000,862 →
Application: 08/725,846 →
Image Processing Using Adjoining Relationships Between Image Parts
Patent: 6,141,462 →
Application: 08/727,141 →
Method and Apparatus for Controlling Substrate Processing Apparatus
Patent: 5,898,588 →
Application: 08/729,588 →
Substrate Spin Treating Method and Apparatus
Patent: 5,788,773 →
Application: 08/731,245 →
Digital Printer
Patent: 5,842,414 →
Application: 08/739,866 →
Substrate Processing Apparatus and Air Supply Method in Substrate Processing Apparatus
Patent: 5,792,259 →
Application: 08/749,348 →
Treating Liquid Supplying Method and Apparatus
Patent: 5,762,684 →
Application: 08/753,706 →
Substrate Processing Management System with Recipe Copying Functions
Patent: 5,867,389 →
Application: 08/757,069 →
Substrate Treating Apparatus and Method for Treating Substrate
Patent: 6,021,790 →
Application: 08/760,643 →
Method of and an Apparatus for Processing a Substrate
Patent: 5,888,344 →
Application: 08/762,164 →
Image Matching with Equivalent Sharpness Enhancement
Patent: 5,907,667 →
Application: 08/785,895 →
Treating Solution Supplying Method and Substrate Treating Apparatus
Patent: 5,765,072 →
Application: 08/803,618 →
Substrate Spin Treating Apparatus
Patent: 5,846,327 →
Application: 08/816,555 →
Method of and Apparatus for Cleaning Substrate
Patent: 6,151,744 →
Application: 08/839,470 →
Substrate Treating Apparatus
Patent: 5,875,804 →
Application: 08/877,008 →
Image Inspection Apparatus in Plate Making Process and Image Inspection Method in Plate Making Process
Patent: 5,969,798 →
Application: 08/895,910 →
Atmosphere Concentration Monitoring for Substrate Processing Apparatus and Life Determination for Atmosphere Processing Unit of Substrate Processing Apparatus
Patent: 6,053,058 →
Application: 08/938,900 →
Substrate Treating Apparatus
Patent: 5,916,366 →
Application: 08/944,229 →
Substrate Processing Apparatus
Patent: 5,943,726 →
Application: 08/957,353 →
An Apparatus and Method for Drying Substrates
Patent: 6,067,727 →
Application: 08/965,249 →
Ultrasonic Vibrator, Ultasonic Cleaning Nozzle, Ultrasonic Cleaning Device, Substrate Cleaning Device, Substrate Cleaning Treatment System and Ultrasonic Cleaning Nozzle Manufacturing Method
Patent: 5,927,306 →
Application: 08/972,780 →
Substrate Processing Apparatus
Patent: 6,099,643 →
Application: 08/993,284 →
Substrate Processing Apparatus
Patent: 5,963,753 →
Application: 09/009,100 →
Treating Solution Supplying Method and Apparatus
Patent: 5,985,357 →
Application: 09/013,113 →
Thermal Processing Apparatus
Patent: 6,040,120 →
Application: 09/014,485 →
Grinding Process Monitoring System and Grinding Process Monitoring Method
Patent: 6,000,996 →
Application: 09/014,487 →
Substrate Processing Apparatus
Patent: 6,060,697 →
Application: 09/039,141 →
Substrate Processing Apparatus Substrate Transport Apparatus and Substrate Transfer Apparatus
Patent: 6,051,101 →
Application: 09/039,824 →
Apparatus for Processing Substrates
Patent: 6,074,515 →
Application: 09/044,812 →
Measurement of Electrical Characteristics of Semiconductor Wafer
Patent: 6,037,781 →
Application: 09/046,348 →
Substrate Processing Apparatus
Patent: 6,012,192 →
Application: 09/059,897 →
Substrate Heat-Treating Apparatus
Patent: 6,062,852 →
Application: 09/060,422 →
Developing Apparatus, Developing Method and Substrate Processing Apparatus
Patent: 6,089,762 →
Application: 09/062,475 →
Substrate Cleaning Apparatus and Method
Patent: 6,286,525 →
Application: 09/071,683 →
Apparatus for Determining Image Processing Parameter, Method of the Same, and Computer Program Product for Realizing the Method
Patent: 6,229,625 →
Application: 09/107,854 →
Method of Color Conversion, Apparatus for the Same, and Computer Program Product for Realizing the Method
Patent: 6,366,291 →
Application: 09/113,616 →
Method of and Apparatus for Supplying Developing Solution Onto Substrate
Patent: 6,076,979 →
Application: 09/121,881 →
Substrate Treating Apparatus
Patent: 6,159,291 →
Application: 09/131,558 →
Substrate Processing Apparatus
Patent: 6,371,713 →
Application: 09/143,027 →
Image Processing Using Parameters Related to Image Input and Output Devices
Patent: 6,115,104 →
Application: 09/145,896 →
Substrate Processing Unit and Substrate Processing Apparatus Using the Same
Patent: 6,155,275 →
Application: 09/149,772 →
Substrate Transport Method and Apparatus
Patent: 6,253,118 →
Application: 09/151,183 →
Substrate Processing Apparatus
Patent: 6,138,695 →
Application: 09/180,032 →
Substrate Treating Apparatus and Substrate Treating Method
Patent: 6,352,083 →
Application: 09/195,190 →
Drawing Apparatus and Drawing Method
Patent: 6,213,020 →
Application: 09/366,459 →
Drawing Apparatus Having Fixing Member for Clamping Material on Drum and Method of Mounting Material
Patent: 6,164,204 →
Application: 09/366,839 →
Image Processing Using Adjoining Relationships Between Image Parts
Patent: 6,577,777 →
Application: 09/572,484 →
Drawing Apparatus Having Fixing Member for Clamping Material on Drum
Patent: 6,334,392 →
Application: 09/614,624 →
Image scanning apparatus, method of scanning images, and recording medium for realizing the method
Patent: 6,304,683 →
Application: 09/716,606 →
Inductive Heat Generator Using Internally Located Heat Sensor
Patent: 6,465,765 →
Application: 09/782,848 →
Publication: US 2001/0017296
Heat Treatment Apparatus
Patent: 6,518,547 →
Application: 09/788,086 →
Publication: US 2001/0027969
Substrate Processing Apparatus, Substrate Inspection Method and Substrate Procesing System
Patent: 6,790,287 →
Application: 09/942,153 →
Publication: US 2002/0189758
Method of and Appratus for Processing Substrate
Patent: 6,790,291 →
Application: 09/962,961 →
Publication: US 2002/0036005
Cleaning Nozzle and Substrate Cleaning Apparatus
Patent: 6,729,561 →
Application: 09/976,134 →
Publication: US 2002/0020763
Substrate Processing Apparatus
Patent: 6,511,315 →
Application: 10/047,604 →
Publication: US 2002/0098458
Substrate Processing Apparatus
Patent: 6,790,286 →
Application: 10/047,818 →
Publication: US 2002/0092368
Substrate Processing Apparatus
Patent: 6,692,165 →
Application: 10/090,099 →
Publication: US 2002/0121341
Substrate Transfer Apparatus and Substrate Transfer Method
Patent: 6,712,579 →
Application: 10/121,778 →
Publication: US 2002/0150459
Substrate Processing Apparatus
Patent: 6,558,053 →
Application: 10/125,229 →
Publication: US 2002/0152958
Scheduling Method and Program for a Substrate Processing Apparatus
Patent: 6,889,105 →
Application: 10/141,213 →
Publication: US 2002/0173868
Substrate Cleaning Apparatus and Method
Patent: 6,942,737 →
Application: 10/155,643 →
Publication: US 2002/0189641
Substrate Processing Apparatus and Method Including a Device for Applying a Coating and a Device for Measuring the Film Quality of the Coating
Patent: 6,913,781 →
Application: 10/170,776 →
Publication: US 2002/0192358
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
Patent: 7,047,100 →
Application: 10/189,975 →
Publication: US 2003/0023340
Substrate Processing Apparatus Equipping with High-Pressure Processing Unit
Patent: 6,841,031 →
Application: 10/201,383 →
Publication: US 2003/0019578
Substrate Treating Method and Apparatus
Patent: 7,105,074 →
Application: 10/202,279 →
Publication: US 2003/0017665
Thin Film Forming Apparatus and Thin Film Forming Method
Patent: 6,926,057 →
Application: 10/216,002 →
Publication: US 2003/0056890
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
Patent: 7,280,883 →
Application: 10/232,319 →
Publication: US 2003/0046034
Scheduling Method and Program for a Substrate Processing Apparatus
Patent: 6,807,452 →
Application: 10/241,224 →
Publication: US 2003/0055522
Thin Film Forming Apparatus and Thin Film Forming Method
Patent: 6,918,421 →
Application: 10/263,513 →
Publication: US 2003/0079829
Apparatus for and Method of Processing Substrate
Patent: 6,656,277 →
Application: 10/270,885 →
Publication: US 2003/0168007
Substrate Processing Apparatus
Patent: 6,793,769 →
Application: 10/281,473 →
Publication: US 2003/0079835
Substrate Cleaning Apparatus and Substrate Cleaning Method
Patent: 7,422,641 →
Application: 10/286,873 →
Publication: US 2003/0084925
Heat Treatment Apparatus and Heat Treatment Method of Substrate
Patent: 7,255,899 →
Application: 10/290,435 →
Publication: US 2003/0089132
Substrate Transfer Apparatus, Substrate Processing Apparatus and Holding Table
Patent: 7,134,826 →
Application: 10/299,638 →
Publication: US 2003/0099527
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,396,199 →
Application: 10/329,667 →
Publication: US 2003/0123971
Substrate Treating Apparatus with Circulating and Heating Mechanism for Removal Liquid
Patent: 7,299,810 →
Application: 10/335,658 →
Publication: US 2003/0176029
Thermal Processing Apparatus and Thermal Processing Method
Patent: 6,998,580 →
Application: 10/347,610 →
Publication: US 2003/0183168
Substrate Processing Apparatus and Substrate Processing Method
Patent: 6,878,303 →
Application: 10/347,845 →
Publication: US 2003/0132193
Chemical Treating Apparatus
Patent: 6,827,782 →
Application: 10/353,151 →
Publication: US 2003/0141314
Substrate Treating Method and Substrate Treating Apparatus
Patent: 7,074,726 →
Application: 10/355,960 →
Publication: US 2003/0140949
Thermal Processing Apparatus and Thermal Processing Method
Patent: 7,038,173 →
Application: 10/357,524 →
Publication: US 2003/0146200
Substrate Treating Method and Apparatus
Patent: 6,941,956 →
Application: 10/382,611 →
Publication: US 2003/0176078
Thin Film Forming Apparatus, Film Supplier, Film Cassette, Transport Mechanism and Transport Method
Patent: 6,868,888 →
Application: 10/387,200 →
Publication: US 2004/0177917
Substrate Treating Apparatus
Patent: 6,814,507 →
Application: 10/394,313 →
Publication: US 2003/0185561
Thermal Processing Apparatus
Patent: 6,868,302 →
Application: 10/394,895 →
Publication: US 2003/0186563
Substrate Treating Apparatus
Patent: 6,893,171 →
Application: 10/417,460 →
Publication: US 2003/0213431
Substrate Processing Apparatus
Patent: 6,752,543 →
Application: 10/427,049 →
Publication: US 2003/0217695
Apparatus and Method for Defect Detection and Program Thereof
Patent: 7,254,263 →
Application: 10/452,876 →
Publication: US 2003/0223631
Substrate Treating Apparatus and Method
Patent: 6,832,863 →
Application: 10/458,719 →
Publication: US 2004/0005149
System for and Method of Processing Substrate
Patent: 6,807,455 →
Application: 10/459,833 →
Publication: US 2004/0002784
Thermal Processing Method and Thermal Processing Apparatus for Substrated Employing Photoirradiation
Patent: 6,936,797 →
Application: 10/460,292 →
Publication: US 2003/0235972
Substrate Processing Apparatus and Control Method of Inert Gas Concentration
Patent: 7,237,562 →
Application: 10/463,064 →
Publication: US 2003/0234030
Substrate Treating System, Substrate Treating Device, Program, and Recording Medium
Patent: 8,052,834 →
Application: 10/541,507 →
Publication: US 2006/0151112
Plating Apparatus, Cartridge and Copper Dissolution Tank for Use in the Plating Apparatus, and Plating Method
Patent: 7,279,079 →
Application: 10/620,728 →
Publication: US 2004/0069647
Thermal Processing Apparatus Performing Irradiating a Substrate with Light
Patent: 6,885,815 →
Application: 10/620,874 →
Publication: US 2004/0013418
Thermal Processing Apparatus for Substrate Employing Photoirradiation
Patent: 6,843,202 →
Application: 10/621,429 →
Publication: US 2004/0018751
Substrate Treatment Method and Substrate Treatment Apparatus
Patent: 7,018,555 →
Application: 10/623,927 →
Publication: US 2004/0159343
Film Thickness Measuring Method, Relative Dielectric Constant Measuring Method, Film Thickness Measuring Apparatus, and Relative Dielectric Constant Measuring Apparatus
Patent: 6,915,232 →
Application: 10/624,871 →
Publication: US 2004/0019442
Substrate Treatment Apparatus and Substrate Treatment Method
Patent: 7,494,549 →
Application: 10/631,797 →
Publication: US 2004/0031503
Light Irradiation Type Thermal Processing Apparatus
Patent: 6,856,762 →
Application: 10/645,067 →
Publication: US 2004/0037543
Substrate Treating Apparatus
Patent: 6,837,632 →
Application: 10/646,902 →
Publication: US 2004/0037677
Substrate Processing Apparatus and Substrate Processing Method Drying Substrate
Patent: 7,811,412 →
Application: 10/648,918 →
Publication: US 2004/0040584
Substrate Processing Apparatus
Patent: 7,584,760 →
Application: 10/659,213 →
Publication: US 2004/0050491
Photoirradiation Thermal Processing Apparatus and Thermal Processing Susceptor Employed Therefor
Patent: 7,062,161 →
Application: 10/661,240 →
Publication: US 2004/0105670
Method of Removing Metal Ion and Apparatus for Treating Substrate
Patent: 6,902,677 →
Application: 10/668,551 →
Publication: US 2004/0055967
Substrate Processing Apparatus and Substrate Processing System
Patent: 7,531,039 →
Application: 10/669,520 →
Publication: US 2004/0055707
Chemical Pump and Method of Discharging Chemical Solution
Patent: 7,048,801 →
Application: 10/680,322 →
Publication: US 2004/0170772
Substrate Treating Apparatus
Patent: 7,267,128 →
Application: 10/681,450 →
Publication: US 2004/0071531
Substrate Processing Method Using Alkaline Solution and Acid Solution
Patent: 7,524,771 →
Application: 10/690,912 →
Publication: US 2004/0087158
Substrate Processing Apparatus, Operation Method Thereof and Program
Patent: 6,937,917 →
Application: 10/726,920 →
Publication: US 2004/0122545
Apparatus for and Method of Heat Treatment by Light Irradiation
Patent: 6,859,616 →
Application: 10/729,460 →
Publication: US 2004/0112890
Substrate Processing Apparatus for Drying Substrate
Patent: 7,418,970 →
Application: 10/740,711 →
Publication: US 2004/0163683
Method of Transporting and Processing Substrates in Substrate Processing Apparatus
Patent: 7,069,099 →
Application: 10/769,390 →
Publication: US 2004/0182318
Heat Treatment Apparatus by Means of Light Irradiation
Patent: 7,091,453 →
Application: 10/780,420 →
Publication: US 2004/0169032
Substrate Processing Apparatus
Patent: 7,704,031 →
Application: 10/813,323 →
Publication: US 2004/0191046
Treating Solution Supply Nozzle, a Substrate Treating Apparatus Having This Nozzle, and a Method of Manufacturing a Treating Solution Supply Nozzle
Patent: 7,267,723 →
Application: 10/836,146 →
Publication: US 2004/0226505
Substrate Processing Apparatus and Thermal Type Flowmeter Suitable to the Same
Patent: 7,216,534 →
Application: 10/844,753 →
Publication: US 2004/0237642
Substrate Processing Apparatus
Patent: 7,364,376 →
Application: 10/846,874 →
Publication: US 2004/0229441
Light Irradiation Type Thermal Processing Apparatus and Method of Adjusting Light Irradiation Intensity
Patent: 7,072,579 →
Application: 10/850,632 →
Publication: US 2004/0264950
Substrate Detecting Apparatus and Method, Substrate Transporting Apparatus and Method, and Substrate Processing Apparatus and Method
Patent: 7,596,425 →
Application: 10/860,267 →
Publication: US 2004/0261550
Measuring Method and Measuring Apparatus of Optical Energy Absorption Ratio, and Thermal Processing Apparatus
Patent: 7,230,709 →
Application: 10/881,234 →
Publication: US 2005/0018196
Heat Treatment Apparatus of Light-Emission Type and Method of Cleaning Same
Patent: 7,068,926 →
Application: 10/926,639 →
Publication: US 2005/0047767
Apparatus and Method for Thermal Processing of Substrate
Patent: 7,935,913 →
Application: 10/940,095 →
Publication: US 2005/0063448
Substrate Processing Apparatus for Inspecting Processing History Data
Patent: 7,128,481 →
Application: 10/940,158 →
Publication: US 2005/0058447
Substrate Processing Unit, Method for Detecting the Position of a Substrate and Substrate Processing Apparatus
Patent: 7,139,638 →
Application: 10/941,785 →
Publication: US 2005/0065634
Substrate Treating Apparatus
Patent: 7,563,323 →
Application: 10/942,180 →
Publication: US 2005/0061441
Substrate Processing Apparatus for Performing Photolithography
Patent: 7,525,650 →
Application: 10/945,014 →
Publication: US 2005/0061242
Substrate Processing Apparatus
Patent: 7,497,912 →
Application: 10/947,000 →
Publication: US 2005/0061248
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,229,240 →
Application: 10/947,480 →
Publication: US 2005/0061240
Substrate Cleaning and Drying Apparatus
Patent: 7,415,985 →
Application: 10/947,712 →
Publication: US 2005/0056307
Thermal Processing Apparatus and Thermal Processing Method
Patent: 7,041,939 →
Application: 10/985,540 →
Publication: US 2005/0115947
Substrate Processing Apparatus and Management Method
Patent: 7,292,909 →
Application: 10/993,956 →
Publication: US 2005/0130453
Substrate Processing Apparatus and Method Including Obstacle Detection
Patent: 7,231,273 →
Application: 11/005,578 →
Publication: US 2005/0123386
Substrate Treating Apparatus
Patent: 7,323,060 →
Application: 11/008,842 →
Publication: US 2005/0161159
Substrate Cleaning Apparatus and Substrate Cleaning Method
Patent: 7,314,529 →
Application: 11/026,246 →
Publication: US 2005/0115596
Substrate Treating Apparatus
Patent: 7,243,911 →
Application: 11/043,823 →
Publication: US 2005/0161839
Thin Film Forming Apparatus, Film Supplier, Film Cassette, Transport Mechanism and Transport Method
Patent: 7,712,806 →
Application: 11/052,599 →
Publication: US 2005/0150450
Thermal Processing Apparatus and Thermal Processing Method
Patent: 7,371,997 →
Application: 11/064,755 →
Publication: US 2005/0149222
Resist Stripping Method and Resist Stripping Apparatus
Patent: 7,682,463 →
Application: 11/080,878 →
Publication: US 2005/0205115
Substrate Treating Apparatus
Patent: 7,160,416 →
Application: 11/081,139 →
Publication: US 2005/0217793
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,591,922 →
Application: 11/101,739 →
Publication: US 2005/0178503
Substrate Treatment Method and Substrate Treatment Apparatus
Patent: 7,241,362 →
Application: 11/120,242 →
Publication: US 2005/0193943
Substrate Treating Apparatus
Patent: 7,422,681 →
Application: 11/121,519 →
Publication: US 2005/0258085
Devices and Methods for Reversing, Transporting, and Processing Substrates
Patent: 7,322,787 →
Application: 11/129,012 →
Publication: US 2006/0045722
Substrate Processing Apparatus and Method
Patent: 7,608,152 →
Application: 11/130,585 →
Publication: US 2005/0276921
Substrate Processing Apparatus and Substrate Processing Method Which Performs Predetermined Processing on a Substrate Which Is Positioned Approximately Horizontally at a Substrate Processing Position
Patent: 7,503,978 →
Application: 11/132,565 →
Publication: US 2005/0284369
Apparatus for and Method of Processing a Substrate with Processing Liquid
Patent: 7,722,736 →
Application: 11/154,363 →
Publication: US 2006/0021636
Heat Treating Apparatus and Method
Patent: 7,327,947 →
Application: 11/158,985 →
Publication: US 2005/0274709
Substrate Processing Apparatus
Patent: 7,549,428 →
Application: 11/190,620 →
Publication: US 2006/0021639
Thermal Processing Apparatus and Thermal Processing Method
Patent: 7,381,928 →
Application: 11/194,337 →
Publication: US 2005/0258162
Substrate Holding and Rotating Apparatus
Patent: 7,354,481 →
Application: 11/197,210 →
Publication: US 2006/0054082
Substrate Processing Apparatus and Method of Removing Particles
Patent: 7,981,286 →
Application: 11/226,640 →
Publication: US 2006/0054191
Substrate Cleaning Method
Patent: 7,300,524 →
Application: 11/235,008 →
Publication: US 2006/0016462
Substrate Holding Device and Substrate Processing Apparatus
Patent: 7,513,263 →
Application: 11/248,056 →
Publication: US 2006/0081274
Substrate Treatment Method and Substrate Treatment Apparatus
Patent: 7,682,456 →
Application: 11/272,600 →
Publication: US 2006/0099339
Substrate Processing Apparatus
Patent: 7,658,560 →
Application: 11/273,441 →
Publication: US 2006/0098977
Substrate Processing Apparatus
Patent: 7,512,456 →
Application: 11/294,268 →
Publication: US 2006/0120716
Substrate Processing Apparatus and Method
Patent: 7,392,814 →
Application: 11/317,971 →
Publication: US 2006/0137719
Substrate Treatment Method and Substrate Treatment Apparatus
Patent: 7,413,628 →
Application: 11/332,637 →
Publication: US 2006/0113039
Substrate Processing Apparatus
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Substrate Processing Apparatus for Treating Substrate with Predetermined Processing by Supplying Processing Liquid to Rim Portion of Rotating Substrate
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Publication: US 2006/0185792
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
Patent: 7,460,923 →
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Publication: US 2006/0206229
Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus
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Publication: US 2006/0241803
Substrate Treating Apparatus and Method
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Publication: US 2006/0213433
Substrate Transport Apparatus and Substrate Transport Method
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Publication: US 2006/0245853
Substrate Processing Apparatus and Substrate Processing Method
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Publication: US 2006/0222315
Substrate Treatment Apparatus and Substrate Treatment Method
Patent: 7,913,346 →
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Publication: US 2006/0219260
Substrate Processing Apparatus and Method of Transporting Substrates and Method of Processing Substrates in Substrate Processing Apparatus
Patent: 7,317,961 →
Application: 11/414,701 →
Publication: US 2006/0195216
Substrate Heat Treatment Apparatus
Patent: 7,432,476 →
Application: 11/417,691 →
Publication: US 2006/0289432
Substrate Processing Method of and Substrate Processing Apparatus for Freezing and Cleaning Substrate
Patent: 7,410,545 →
Application: 11/434,322 →
Publication: US 2006/0266382
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,541,285 →
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Publication: US 2007/0042511
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,615,118 →
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Publication: US 2007/0072436
Resist Removing Method and Resist Removing Apparatus
Patent: 7,427,333 →
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Publication: US 2007/0045231
Substrate Processing Apparatus and Substrate Transfer Method
Patent: 8,157,496 →
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Treating Solution Supply Nozzle, a Substrate Treating Apparatus Having This Nozzle, and a Method of Manufacturing a Treating Solution Supply Nozzle
Patent: 7,628,862 →
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Reflected Light Intensity Ratio Measuring Device, Device for Measuring Light Energy Absorption Ratio and Heat Treatment Apparatus
Patent: 7,439,534 →
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Substrate Heat Treatment Apparatus
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Apparatus for and Method of Processing Substrate Subjected to Exposure Process
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Substrate Processing Method and Substrate Processing Apparatus
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Substrate Treating Apparatus
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Substrate Heat Treatment Apparatus
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Substrate Heat Treatment Apparatus
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Substrate Processing Method and Substrate Processing Apparatus
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Publication: US 2007/0131246
Carbon Nanotube Device and Process for Producing the Same
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Substrate Processing Method and Substrate Processing Apparatus
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Substrate Processing Apparatus
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Developing Apparatus and Developing Method
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Substrate Processing Apparatus
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Substrate Processing Apparatus and Substrate Handling Method
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Publication: US 2007/0207706
Substrate Support Structure, Heat Treatment Apparatus Using Same, First Sheet-Like Object for Use in the Substrate Support Structure, Method of Manufacturing the Substrate Support Structure, Heat Treatment Apparatus, and Substrate Sucking Method
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Publication: US 2007/0222131
Substrate Processing Apparatus and Substrate Processing Method
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Substrate Processing Apparatus and Substrate Transferring Method
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Heat Treatment Apparatus of Light Emission Type
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Substrate Processing Apparatus
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Substrate Treatment Apparatus
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Substrate Processing Method and Substrate Processing Apparatus
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Substrate Treatment Method and Substrate Treatment Apparatus
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Substrate Treating Apparatus
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Substrate Processing Apparatus
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Susceptor for Heat Treatment and Heat Treatment Apparatus
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Substrate Processing Apparatus, Liquid Film Freezing Method and Substrate Processing Method
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Managing Apparatus for Substrate Processing System
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Substrate Processing Apparatus and Substrate Processing Method
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Substrate Processing Apparatus
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Substrate Processing Apparatus and Substrate Processing Method
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Heat Treatment Apparatus and Heat Treatment Method
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Substrate Processing Apparatus and Substrate Processing Method
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Heat Treatment Apparatus Which Emits Flash of Light
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Substrate Treating Apparatus
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Substrate Processing Apparatus
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Substrate Processing Apparatus and Substrate Processing Method
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Heat Treatment Apparatus Emitting Flash of Light
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Substrate Processing Apparatus
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Substrate Processing Apparatus and Substrate Processing Method
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Substrate Treatment Apparatus
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Defect Inspection Apparatus, Defect Inspection Program, Recording Medium Storing Defect Inspection Program, Figure Drawing Apparatus and Figure Drawing System
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Substrate Processing Apparatus for Processing Plurality of Substrates in Succession
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Substrate Treatment Apparatus
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Image Data Generating Method, Printing Method, Image Data Generating Apparatus, and Printer
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Threshold Matrix Generating Method, Image Data Generating Method, Image Data Generating Apparatus, Image Recording Apparatus and Recording Medium
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Substrate Treating Apparatus and Substrate Treating Method
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Scheduling Method and Program for a Substrate Treating Apparatus
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Subtrate Treatment Apparatus
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Substrate Processing Apparatus and Substrate Processing Method
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Heat Treatment Apparatus Heating Substrate by Irradiation with Light
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Substrate Treating System
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Resist Removing Method and Resist Removing Apparatus
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Substrate Treating Method
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Substrate Cleaning Apparatus and Substrate Cleaning Method
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Substrate Processing Apparatus and Substrate Processing Method for Performing Etching Process with Phosphoric Acid Solution
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Apparatus for and Method of Processing Substrate
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Heat Treatment Apparatus and Method for Heating Substrate by Irradiation Thereof with Light
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Substrate Processing Apparatus and a Substrate Processing Method
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Heat Treatment Apparatus
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Substrate Processing Apparatus and Substrate Processing Method
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Substrate Treating Apparatus, and a Substrate Transporting Method Therefor
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Substrate Treating Apparatus and Substrate Treating Method
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Substrate Processing Apparatus
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Threshold Matrix Generation Method, Halftone Image Generation Method, and Halftone Image Generating Apparatus
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Light-Emitting Heat Treatment Apparatus
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Substrate Treatment Method and Substrate Treatment Apparatus
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Halftone Image Generation Method, Threshold Matrix Generation Method, Threshold Matrix, Printing Plate Manufacturing Method, and Printing Plate
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Substrate Treating Apparatus and Method
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Method and Apparatus for Processing Semiconductor Wafer After Impurity Implantation
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Substrate Treating Apparatus and Substrate Treating Method
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Substrate Treating Apparatus and Substrate Treating Method
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Heat Treatment Apparatus and Method for Heating Substrate by Light Irradiation
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Heat Treatment Apparatus and Method for Heating Substrate by Photo-Irradiation
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Heat Treatment Apparatus and Method for Heating Substrate by Photo-Irradiation
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Image Recording Apparatus
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Publication: US 2010/0079532
Substrate Treatment Apparatus
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Zinc Oxide Film Forming Method and Apparatus
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Publication: US 2010/0167460
Optical Modulator
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Publication: US 2010/0166356
Heat Treatment Apparatus and Method for Heating Substrate by Light-Irradiation
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Substrate Processing Apparatus and Substrate Transport Method
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Heat Treatment Method and Heat Treatment Apparatus for Heating Substrate by Light Irradiation
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Image Recording Device
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Publication: US 2010/0328376
Substrate Treating Apparatus and Method
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Substrate Processing Method
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Publication: US 2010/0285225
Discharge Liquid Agitating Mechanism, and an Inkjet Recording Apparatus Having the Discharge Liquid Agitating Mechanism
Patent: 8,459,784 →
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Publication: US 2011/0074893
Substrate Transporting Apparatus, Substrate Platform Shelf and Substrate Processing Apparatus
Patent: 8,500,915 →
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Publication: US 2011/0008148
Apparatus for Generating Spatially Modulated Light and Image Recording Apparatus
Patent: 8,436,885 →
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Publication: US 2011/0069136
Image Recording Device
Patent: 8,579,286 →
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Publication: US 2012/0120464
Substrate Treating Method for Treating Substrates with Treating Liquids
Patent: 8,652,268 →
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Publication: US 2011/0126859
Substrate Treatment Apparatus and Substrate Treatment Method
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Publication: US 2011/0240067
Substrate Treatment Apparatus and Substrate Treatment Method
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Publication: US 2011/0240601
Battery Manufacturing Method, Battery Manufactured by Such Method, Vehicle and Electronic Device
Patent: 8,771,383 →
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Publication: US 2012/0002359
Substrate Treating Method
Patent: 8,608,864 →
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Publication: US 2011/0303242
Substrate Processing Apparatus, and Substrate Transport Method
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Publication: US 2012/0016516
Optical Device, a Method of Manufacturing Optical Device, and Exposure Apparatus
Patent: 8,784,675 →
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Publication: US 2012/0081772
Substrate Processing Method
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Publication: US 2012/0045581
Heat Treatment Apparatus for Heating Substrate by Irradiating Substrate with Flashes of Light
Patent: 8,624,165 →
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Publication: US 2012/0067864
Heat Treatment Apparatus Heating Substrate by Irradiation with Light
Patent: 8,447,177 →
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Heat Treatment Apparatus and Method for Heating Substrate by Light Irradiation
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Heat Treatment Apparatus Emitting Flash of Light
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Heat Treatment Apparatus Emitting Flash of Light
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Heat Treatment Apparatus Emitting Flash of Light
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Substrate Processing Method
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Optical Device, Exposure Apparatus and Laser Apparatus
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Substrate Processing Method and Substrate Processing Apparatus
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Heat Treatment Method and Heat Treatment Apparatus for Heating Substrate by Light Irradiation
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Printing Apparatus
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Inkjet Image Recorder and Method for Correction of Belt Conveyance
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Substrate Processing Apparatus and Substrate Processing Method
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Preparation Process of All-Solid Battery
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Threshold Matrix Generating Method, Image Data Generating Method, Image Data Generating Apparatus, Image Recording Apparatus And Recording Medium
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Preparation Process of Electrode for Battery
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Substrate Treating Method
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Heat Treatment Method for Heating Substrate by Irradiating Substrate with Flash of Light
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Heat Treatment Method for Growing Silicide
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Heat Treatment Method for Promoting Crystallization of High Dielectric Constant Film
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Inkjet Printer and Correction Value Acquisition Method
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Substrate Treating Apparatus
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Device for and Method of Generating Wiring Data, and Imaging System
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Heat Treatment Apparatus Heating Substrate by Irradiation with Light
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Apparatus for and Method of Drawing
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Related Assignments (25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Dec 5, 1994
From: KAWATANI, MASAFUMI; TERASHIMA, KOUZOU; SHIRAKAWA, HAZIME
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007266/0954 →
Assignment of Assignor's Interest Dec 23, 1994
From: KUSUDA, TATSUFUMI; KOUNO, MOTOHIRO; NAKATANI, IKUYOSHI; HIRAE, SADAO
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007374/0707 →
Assignment of Assignor's Interest Jan 3, 1995
From: YOSHIMOTO, TAKESHI
To: DAINIPPON SCREEN MFG. CO., LTD. A JAPANESE CORP.
Reel/Frame 007307/0868 →
Assignment of Assignor's Interest Feb 23, 1995
From: USUI, NOBUAKI; FUJIMOTO, HIROKI; TANIGUCHI, KAZUTAKA; IMAMURA, ATSUSHI
To: DAINIPPON SCREEN MFG. CO., LTD. (A CORPORATION OF JAPAN)
Reel/Frame 007383/0399 →
Assignment of Assignor's Interest Apr 6, 1995
From: MORIMOTO, TORU; HASHINOKI, KENJI; HAMADA, TETSUYA; KAMEI, KENJI
To: DAINIPPON SCREEN MFG. CO., LTD.,
Reel/Frame 007431/0040 →
Assignment of Assignor's Interest Apr 7, 1995
From: MORIMOTO, TORU; HASHINOKI, KENJI; HAMADA, TETSUYA; KAMEI, KENJI
To: DAINIPPON SCREEN MFG. CO., LTD.,
Reel/Frame 007443/0453 →
Assignment of Assignor's Interest Jun 2, 1995
From: HIRAE, SADAO; OKADA, HIROSHI; MATSUBARA, HIDEAKI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007510/0964 →
Assignment of Assignor's Interest Jun 5, 1995
From: SASADA, SHIGERU; AOKI, KAORU; KODAMA, MITSUMASA; SUGIMOTO, KENJI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007758/0388 →
Assignment of Assignor's Interest Jun 5, 1995
From: UMABA, TAKAYUKI
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 007502/0513 →
Assignment of Assignor's Interest Jun 15, 1995
From: NAKAJIMA, KAZUO; TANAKA, KATSUNORI; OGAMI, NOBUTOSHI
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 007552/0558 →
Assignment of Assignor's Interest Jun 28, 1995
From: SUGIMOTO, KENJI; HIRAOKA, NOBUYASU; FUJITA, MITSUHIRO; OHTANI, MASAMI
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 007573/0742 →
Re-Record to Correct the Title of Invention in a Previously Recorded Document on Reel 7266 Frame 0220 Jul 3, 1995
From: KAWATANI, MASAFUMI; TERASHIMA, KOUZOU; SHIRAKAWA, HAZIME
To: DAINIPPON SCREEN MFG. CO., LTD., A CORPORATION OF JAPAN
Reel/Frame 007525/0389 →
Assignment of Assignor's Interest Sep 18, 1995
From: NISHIMURA, JOICHI; SASAKI, TADASHI; OHTANI, MASAMI
To: DAINIPPON SCREEN MFG. CO., LTD. A CORP OF JAPAN
Reel/Frame 007733/0780 →
Assignment of Assignor's Interest Dec 27, 1995
From: FUJIKAWA, KAZUNORI; YASUI, KENJI; NISHIZAWA, HISAO
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007859/0876 →
Assignment of Assignor's Interest Mar 4, 1996
From: MATSUMURA, YOSHIO
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 007931/0804 →
Assignment of Assignor's Interest Mar 20, 1996
From: IMAMURA, ATSUSHI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007924/0105 →
Assignment of Assignor's Interest Mar 29, 1996
From: NISHIMURA, JOICHI; SASAKI, TADASHI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007957/0672 →
Assignment of Assignor's Interest Apr 10, 1996
From: OKA, JUNICHI
To: DAINIPPON SCREEN MFG. CO., LTD., A CORPORATION OF JAPAN
Reel/Frame 007944/0273 →
Assignment of Assignor's Interest Apr 19, 1996
From: ISONO, KOICHI; YONEZAWA, THOURU; CHO, MASAMICHI
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 007960/0166 →
Assignment of Assignor's Interest May 7, 1996
From: SASAKI, TADASHI; OHTANI, MASAMI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 008009/0323 →
Assignment of Assignor's Interest May 10, 1996
From: MORITA, AKIHIKO; UENO, KENJI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 007982/0258 →
Assignment of Assignor's Interest Jun 6, 1996
From: SUHARA, TADAHIRO; SUGIMOTO, KENJI
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 009836/0110 →
Assignment of Assignor's Interest Jun 18, 1996
From: KIZAKI, KOJI; MIYAGI, MASAHIRO; NARITA, KATSUNAGA
To: DAINIPPON SCREEN MFG. CO., LTD.
Reel/Frame 008039/0168 →
Assignment of Assignor's Interest Jul 10, 1996
From: SUZUKI, SATOSHI; YOSHITANI, MITSUAKI; MATSUMURA, YOSHIO; AKITA, YASUHIRO
To: DAINIPPON SCREEN MFG. CO., LTD., A CORP. OF JAPAN
Reel/Frame 008109/0764 →
Assignment of Assignor's Interest Jul 11, 1996
From: HIRAI, KEISUKE; SYUDOU, TADASHI; YOSHIDA, TAKUMI; MATSUNO, YOSHIKAZU
To: DAINIPPON SCREEN MFG., CO., LTD., A CORPORATION OF JAPAN
Reel/Frame 008111/0605 →