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US 6,790,286 · Confirmation No. 4742

SUBSTRATE PROCESSING APPARATUS

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2004-08-05 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-02 892 List of references cited by examiner 1 View
2004-06-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-02 FWCLM Index of Claims 1 View
2004-06-02 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-27 SRNT Examiner's search strategy and results 10 View
2004-03-19 CTAV Advisory Action (PTOL-303) 3 View
2004-03-19 FWCLM Index of Claims 1 View
2004-03-19 CLM Claims 5 View
2004-03-17 RCEX Request for Continued Examination (RCE) 2 View
2004-03-11 WFEE Fee Worksheet (SB06) 1 View
2004-03-03 SAFR Supplemental Amendment after Final Rejection 2 View
2004-03-03 CLM Claims 5 View
2004-03-03 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-02-17 CTAV Advisory Action (PTOL-303) 3 View
2004-02-17 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-17 FWCLM Index of Claims 1 View
2004-01-22 LET. Miscellaneous Incoming Letter 1 View
2004-01-20 A.NE Response After Final Action 2 View
2004-01-20 CLM Claims 5 View
2004-01-20 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-10-17 CTFR Final Rejection 10 View
2003-10-15 SRNT Examiner's search strategy and results 5 View
2003-08-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-08-11 CLM Claims 4 View
2003-08-11 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-06-02 FRPR Certified Copy of Foreign Priority Application 26 View
2003-06-02 FRPR Certified Copy of Foreign Priority Application 32 View
2003-05-06 CTNF Non-Final Rejection 8 View
2003-05-06 892 List of references cited by examiner 1 View
2003-05-06 1449 List of References cited by applicant and considered by examiner 1 View
2003-05-01 SRNT Examiner's search strategy and results 2 View
2002-03-25 LET. Miscellaneous Incoming Letter 1 View
2002-03-25 FOR Foreign Reference 5 View
2002-03-25 FOR Foreign Reference 7 View
2002-03-25 FOR Foreign Reference 17 View
2002-01-15 TRNA Transmittal of New Application 1 View
2002-01-15 ADS Application Data Sheet 2 View
2002-01-15 SPEC Specification 33 View
2002-01-15 CLM Claims 5 View
2002-01-15 ABST Abstract 1 View
2002-01-15 DRW Drawings-only black and white line drawings 14 View
2002-01-15 OATH Oath or Declaration filed 4 View
2002-01-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-01-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-01-15 FWCLM Index of Claims 1 View
2002-01-15 TRNA Transmittal of New Application 1 View
2002-01-15 DRW Drawings-only black and white line drawings 14 View
2002-01-15 SPEC Specification 33 View
2002-01-15 CLM Claims 5 View
2002-01-15 ABST Abstract 1 View
2002-01-15 OATH Oath or Declaration filed 4 View
2002-01-15 WFEE Fee Worksheet (SB06) 1 View
2002-01-15 TRNA Transmittal of New Application 1 View
2002-01-15 WCLM Claims Worksheet (PTO-2022) 1 View
2002-01-15 ADS Application Data Sheet 2 View
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Quick Facts
Patent No.
US 6,790,286
App. No.
10/047,818
Filed
2002-01-15
Granted
2004-09-14
Pub. No.
US20020092368A1
Art Unit
1763
PTA
-65 days