Granted Patent
Utility
US 6,656,277 · App. 10/270,885
Apparatus for and method of processing substrate
Inventors:
Masakazu Sanada, Masahiko Harumoto, Hiroshi Kobayashi, Minobu Matsunaga
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Oct 11, 2002
Inventors
Masakazu Sanada
Masahiko Harumoto
Hiroshi Kobayashi
Minobu Matsunaga
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.