Granted Patent
Utility
US 6,558,053
· Confirmation No. 1446
SUBSTRATE PROCESSING APPARATUS
Inventors
Kazuhito Shigemori
Kyoto, JAPAN
Masakazu Sanada
Kyoto, JAPAN
Minobu Matsunaga
Kyoto, JAPAN
Katsushi Yoshioka
Kyoto, JAPAN
Kenji Sugimoto
Kyoto, JAPAN
Kaoru Aoki
Kyoto, JAPAN
Moritaka Yano
Kyoto, JAPAN
Satoshi Yamamoto
Kyoto, JAPAN
Tsuyoshi Mitsuhashi
Kyoto, JAPAN
Takashi Nagao
Kyoto, JAPAN
Mitsumasa Kodama
Kyoto, JAPAN
Yukihiko Inagaki
Kyoto, JAPAN
Yoshihisa Yamada
Kyoto, JAPAN
Attorneys & Agents of Record
Classification
USPC
396/611
H10P72/0452
H10P72/0448
H10P72/0454
H10P72/0458
Prosecution
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- Customer No.
- 2352
- Docket No.
- P/1596-54
- Confirmation No.
- 1446
Foreign Priority
2001-121228 (P)
·
2001-04-19
·
JAPAN
2002-26338 (P)
·
2002-02-04
·
JAPAN
2002-26852 (P)
·
2002-02-04
·
JAPAN
2002-46587 (P)
·
2002-02-22
·
JAPAN
Publication
- Pub. No.
- US20020152958A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
-120days
No related applications found.
from
MATSUNAGA, MINOBU,
MITSUHASHI, TSUYOSHI,
NAGAO, TAKASHI,
SANADA, MASAKAZU,
SHIGEMORI, KAZUHITO,
SUGIMOTO, KENJI,
YOSHIOKA, KATSUSHI,
AOKI, KAORU,
YAMADA, YOSHIHISA,
KODAMA, MITSUMASA,
INAGAKI, YUKIHIKO,
YAMAMOTO, SATOSHI,
YANO, MORITAKA
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-08
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Quick Facts
- Patent No.
- US 6,558,053
- App. No.
- 10/125,229
- Filed
- 2002-04-18
- Granted
- 2003-05-06
- Pub. No.
- US20020152958A1
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- PTA
- -120 days
External Links