Substrate treating method and apparatus
View Patent ↗A substrate treating method for treating substrates with a treating solution includes a step of heating a treating solution containing sulfuric acid, and treating, with the treating solution, the substrates coated with a film material including a high dielectric-constant material. The substrates with the high dielectric-constant material are treated appropriately by heating, before use, the treating solution containing sulfuric acid.
1. A substrate treating apparatus etching a high dielectric-constant film of metal oxide formed on a substrate, comprising:
a first treating unit having a first treating tub storing sulfuric acid, the substrate being immersed in the sulfuric acid in the first treating tub and thereby causing the sulfuric acid to react with the metal oxide constituting the high dielectric-constant film, thereby forming a metal sulfate, and heating the sulfuric acid to a range of 150 to 200° C.;
wherein said oxide is selected from the group consisting of oxides of hafnium Hf and zirconium Zr, silicate, and aluminate; and
a second treating unit having a second treating tub storing deionized water, the substrate being immersed in the deionized water in the second treating tub and thereby dissolving said metal sulfate in the deionized water, thereby removing said metal sulfate from the substrate.
2. An apparatus as defined in claim 1 , wherein said treating solution has sulfuric acid in a concentration of 20 to 100% by weight.
3. An apparatus as defined in claim 1 , wherein said heating unit is mounted on said treating solution pipe.
4. A substrate treating apparatus treating substrates coated with a film material containing a high dielectric-constant material, said apparatus comprising:
a treating tub receiving and treating the substrates; said high dielectric-constant material contained in the substrates being an oxide selected from the group consisting of oxides of hafnium Hf and zirconium Zr, silicate, and aluminate,
a treating solution pipe supplying a treating solution containing sulfuric acid to said treating tub; and
a heating unit heating said treating solution, wherein said treating solution is heated to a range of 150 to 200° C.
5. An apparatus as defined in claim 4 , wherein said treating solution has sulfuric acid in a concentration of 20 to 100% by weight.
6. An apparatus as defined in claim 4 , wherein said heating unit is mounted on said treating solution pipe.