Granted Patent
Utility
US 5,785,068 · App. 08/646,131
Substrate spin cleaning apparatus
Inventors:
Tadashi Sasaki, Masami Ohtani
Patented Case
View Patent ↗
Granted: Jul 28, 1998
Filed: May 17, 1996
Inventors
Tadashi Sasaki
Masami Ohtani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.