IP Library › Granted Patent US 5,788,773
Granted Patent Utility
US 5,788,773 · App. 08/731,245

Substrate spin treating method and apparatus

Inventors: Seiichiro Okuda, Kenji Sugimoto, Hiroshi Yoshii
Patented Case View Patent ↗
Granted: Aug 4, 1998 Filed: Oct 11, 1996
Inventors
Seiichiro Okuda
Kenji Sugimoto
Hiroshi Yoshii
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 5,788,773
App. No.
08/731,245
Filed
1996-10-11
Granted
1998-08-04
Kind
A