Substrate processing apparatus
View Patent ↗An interface transport mechanism uses an upper hand when transporting a substrate from a substrate platform to an exposure device before exposure processing by an exposure device, and uses a lower hand when transporting the substrate from the exposure device to the substrate platform after the exposure processing by the exposure device. That is, the lower hand is used to transport a substrate to which a liquid is attached after exposure processing, and the upper hand is used to transport a substrate to which no liquid is attached before exposure processing.
1. A substrate processing apparatus that is arranged adjacent to a liquid immersion exposure device that performs exposure processing by a liquid immersion method, comprising:
a processing section for applying processing to a substrate; and
an interface for exchanging the substrate between said processing section and said exposure device, wherein
said interface includes a transport device that transports the substrate between said processing section and said exposure device, and
said transport device includes a first holder for holding the substrate to which no liquid is attached before the exposure processing by said liquid immersion exposure device, and a second holder for holding the substrate to which a liquid is attached after the exposure processing by said liquid immersion exposure device; wherein
said first and second holders are provided one above the other, and
said second holder is provided below said first holder.
2. The substrate processing apparatus according to claim 1 , wherein
said processing section includes a thermal processing unit that subjects the substrate to given thermal treatment.
3. The substrate processing apparatus according to claim 1 , wherein
said processing section includes a photosensitive film formation unit that forms a photosensitive film made of a photosensitive material on the substrate.
4. The substrate processing apparatus according to claim 3 , wherein
said processing section further includes an anti-reflection film formation unit that forms an anti-reflection film on the substrate before the formation of said photosensitive film by said photosensitive film formation unit.
5. The substrate processing apparatus according to claim 1 , wherein
said processing section includes a development processing unit that subjects the substrate to development processing.
6. A substrate processing apparatus that is arranged adjacent to a liquid immersion exposure device that performs exposure processing by a liquid immersion method, comprising:
a processing section for applying processing to a substrate; and
an interface for exchanging the substrate between said processing section and said exposure device, wherein
said interface includes a transport device that transports the substrate between said processing section and said exposure device, and
said transport device includes a first holder for holding the substrate to which no liquid is attached before the exposure processing by said liquid immersion exposure device, and a second holder for holding the substrate to which a liquid is attached after the exposure processing by said liquid immersion exposure device; wherein
said interface further includes a processing unit that applies given processing to the substrate and a platform on which the substrate is temporarily mounted, and
said transport device includes:
a first transport unit that transports the substrate between said processing section, said processing unit, and said platform; and
a second transport unit that transports the substrate between said exposure device and said platform, and wherein
said second transport unit has said first and second holders;
wherein
said first transport unit has a third holder for holding the substrate before the exposure processing by said exposure device and a fourth holder for holding the substrate after the exposure processing by said exposure device.
7. The substrate processing apparatus according to claim 6 , wherein
said platform includes a first platform unit on which the substrate before the exposure processing by said exposure device is mounted, and a second platform unit on which the substrate after the exposure processing by said exposure device is mounted.
8. The substrate processing apparatus according to claim 6 , wherein
said processing unit includes an edge exposure unit that subjects a peripheral portion of the substrate to exposure.
9. The substrate processing apparatus according to claim 6 , wherein
said first and second holders are provided one above the other, and
said second holder is provided below said first holder.
10. The substrate processing apparatus according to claim 6 , wherein
said first and second holders are aligned in a substantially horizontal direction.