IP Library › Granted Patent US 6,752,543
Granted Patent Utility
US 6,752,543 · Confirmation No. 5555

SUBSTRATE PROCESSING APPARATUS

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-05-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-27 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-02-27 892 List of references cited by examiner 1 View
2004-02-27 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-27 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-27 SRFW Search information including classification, databases and other search related notes 1 View
2003-07-21 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-07-21 FOR Foreign Reference 6 View
2003-07-21 FOR Foreign Reference 6 View
2003-07-21 FOR Foreign Reference 8 View
2003-04-30 TRNA Transmittal of New Application 1 View
2003-04-30 ADS Application Data Sheet 1 View
2003-04-30 SPEC Specification 22 View
2003-04-30 CLM Claims 3 View
2003-04-30 ABST Abstract 1 View
2003-04-30 DRW Drawings-only black and white line drawings 6 View
2003-04-30 OATH Oath or Declaration filed 4 View
2003-04-30 WFEE Fee Worksheet (SB06) 1 View
2003-04-30 WFEE Fee Worksheet (SB06) 1 View
2003-04-30 FRPR Certified Copy of Foreign Priority Application 33 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,752,543
App. No.
10/427,049
Filed
2003-04-30
Granted
2004-06-22
Pub. No.
US20030217695A1
Art Unit
2851
PTA
0 days