IP Library › Granted Patent US 6,138,695
Granted Patent Utility
US 6,138,695 · App. 09/180,032

Substrate processing apparatus

Inventors: Takuya Shibao, Toshiyuki Osaki, Koji Hasegawa
Patented Case View Patent ↗
Granted: Oct 31, 2000 Filed: Oct 30, 1998
Inventors
Takuya Shibao
Toshiyuki Osaki
Koji Hasegawa
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 6,138,695
App. No.
09/180,032
Filed
1998-10-30
Granted
2000-10-31
Kind
A