Heat treatment apparatus emitting flash of light
View Patent ↗Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.
1. A heat treatment method irradiating a substrate with a flash of light from a flash lamp to heat the substrate, comprising:
(a) a first irradiation step of irradiating an entire surface of said substrate with a flash of light for a duration of a first irradiation time; and
(b) a second irradiation step of irradiating the entire surface of said substrate with a flash of light for a duration of a second irradiation time longer than said first irradiation time,
wherein,
at least a part of the duration of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step.
2. The heat treatment method according to claim 1 , wherein
said first irradiation step and said second irradiation step are started at the same time.
3. The heat treatment method according to claim 1 , wherein
said first irradiation step and said second irradiation step are started at different times.
4. The heat treatment method according to claim 1 , wherein
said first irradiation time is approximately 1.0 milliseconds; and
said second irradiation time is approximately 3.0 milliseconds.
5. The heat treatment method according to claim 1 , wherein
a surface temperature of said substrate is risen to a treatment temperature not less than a predetermined value by the irradiation of flash of light of said first irradiation step, and the surface temperature of said substrate is maintained at said treatment temperature for not less than a predetermined duration of time by the irradiation of a flash of light by said second irradiation step.
6. A heat treatment method irradiating a substrate with a flash of light from a flash lamp to heat the substrate, comprising:
(a) a first irradiation step of irradiating an entire surface said substrate with a flash of light with a first peak intensity; and
(b) a second irradiation step of irradiating the entire surface of said substrate with a flash of light with a second peak intensity lower than said first peak intensity,
wherein,
at least a part of the duration of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step.
7. The heat treatment method according to claim 6 , wherein
said first irradiation step and said second irradiation step are started at the same time.
8. The heat treatment method according to claim 6 , wherein
said first irradiation step and said second irradiation step are started at different times.
9. The heat treatment method according to claim 6 , wherein
irradiation time of a flash of light in said first irradiation step is approximately 1.0 milliseconds; and
irradiation time of a flash of light in said second irradiation step is approximately 3.0 milliseconds.
10. The heat treatment method according to claim 6 , wherein
a surface temperature of said substrate is raised to a treatment temperature not less than a predetermined value by the irradiation of a flash of light of said first irradiation step, and the surface temperature of said substrate is maintained at said treatment temperature for not less than a predetermined duration of time by the irradiation of a flash of light by said second irradiation step.