Heat treatment method for promoting crystallization of high dielectric constant film
View Patent ↗A film of silicon dioxide is formed on the silicon-germanium layer, and a high dielectric constant film is further formed on the film of silicon dioxide. First irradiation from a flash lamp is performed on the semiconductor wafer to increase the temperature of a front surface of the semiconductor wafer from a preheating temperature to a target temperature for a time period in the range of 3 milliseconds to 1 second. Subsequently, second irradiation from the flash lamp is performed to maintain the temperature of the front surface of the semiconductor wafer within a ±25° C. range around the target temperature for a time period in the range of 3 milliseconds to 1 second. This promotes the crystallization of the high dielectric constant film while suppressing the alleviation of distortion in the silicon-germanium layer.
1. A method of heating a substrate including a high dielectric constant film formed on a silicon-germanium layer to promote the crystallization of said high dielectric constant film, said method comprising the steps of:
(a) forming a first silicon-germanium layer on a substrate, said first silicon-germanium layer including a second silicon-germanium layer with a first germanium concentration and third silicon-germanium layers with a second germanium concentration higher than said first germanium concentration, said second silicon-germanium layer being sandwiched between said third silicon-germanium layers;
(b) forming a film of silicon dioxide on said second silicon-germanium layer, and forming a high dielectric constant film on said film of silicon dioxide;
(c) heating said substrate including said high dielectric constant film formed thereon at a predetermined preheating temperature;
(d) irradiating said substrate with light to increase the temperature of a front surface of said substrate from said preheating temperature to a target temperature for a time period in the range of 3 milliseconds to 1 second; and
(e) irradiating said substrate with light to maintain the temperature of the front surface of said substrate within a ±25° C. range around said target temperature for a time period in the range of 3 milliseconds to 1 second, said step (e) being performed after said step (d).
2. The method according to claim 1 , wherein
said preheating temperature is in the range of 600° C. to 900° C., and
said target temperature is in the range of 1000° C. to 1200° C.
3. The method according to claim 1 , wherein
said substrate is irradiated with a flash of light from a flash lamp in said step (d) and in said step (e).
4. The method according to claim 3 , wherein
a switching element intermittently supplies electrical charges from a capacitor to said flash lamp to control an emission output from said flash lamp in said step (d) and in said step (e).
5. The method according to claim 4 , wherein
the electrical charges are intermittently supplied from said capacitor to said flash lamp by applying a plurality of pulses to the gate of said switching element.
6. The method according to claim 5 , wherein
said switching element is an insulated-gate bipolar transistor.
7. The method according to claim 1 , wherein
a gate electrode including at least one metal selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, tantalum, molybdenum, and tungsten is formed on said high dielectric constant film.
8. The method according to claim 1 , wherein
said high dielectric constant film includes at least one selected from the group consisting of TiN, ZrN, HfN, VN, NbN, TaN, MoN, WN, TiSiN, HfSiN, VSiN, NbSiN, TaSiN, MoSiN, WSiN, HfAlN, VAlN, NbAlN, TaAlN, MoAlN, and WAlN.