IP Library › Granted Patent US 6,793,769
Granted Patent Utility
US 6,793,769 · Confirmation No. 3991

SUBSTRATE PROCESSING APPARATUS

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2004-04-23 CLM Claims 3 View
2004-04-23 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-20 CTNF Non-Final Rejection 6 View
2004-01-20 1449 List of References cited by applicant and considered by examiner 1 View
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2002-10-25 TRNA Transmittal of New Application 1 View
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Quick Facts
Patent No.
US 6,793,769
App. No.
10/281,473
Filed
2002-10-25
Granted
2004-09-21
Pub. No.
US20030079835A1
Art Unit
1763
PTA
-3 days