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US 6,790,287 · Confirmation No. 6816

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE INSPECTION METHOD AND SUBSTRATE PROCESING SYSTEM

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2004-07-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-07-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-07-13 SPEC Specification 1 View
2004-07-06 WFEE Fee Worksheet (SB06) 1 View
2004-05-06 A.NA Amendment after Notice of Allowance (Rule 312) 2 View
2004-05-06 SPEC Specification 1 View
2004-05-06 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-04-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-04-16 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-28 892 List of references cited by examiner 1 View
2004-01-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-28 FWCLM Index of Claims 1 View
2004-01-28 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-20 SRNT Examiner's search strategy and results 3 View
2003-10-20 XT/ Extension of Time 2 View
2003-10-20 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2003-10-20 CLM.NE Claim-Amendment Not Entered 5 View
2003-10-20 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-20 RCEX Request for Continued Examination (RCE) 2 View
2003-09-19 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2003-06-19 CTFR Final Rejection 8 View
2003-06-19 892 List of references cited by examiner 1 View
2003-03-24 SA.. Supplemental Response or Supplemental Amendment 2 View
2003-03-24 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-03-24 CLM Claims 2 View
2003-02-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-02-14 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-02-14 CLM Claims 7 View
2003-02-14 XT/ Extension of Time 1 View
2002-10-09 CTNF Non-Final Rejection 7 View
2002-10-09 892 List of references cited by examiner 1 View
2001-10-09 FRPR Certified Copy of Foreign Priority Application 32 View
2001-10-09 FRPR Certified Copy of Foreign Priority Application 47 View
2001-08-29 TRNA Transmittal of New Application 1 View
2001-08-29 ADS Application Data Sheet 2 View
2001-08-29 SPEC Specification 29 View
2001-08-29 CLM Claims 5 View
2001-08-29 ABST Abstract 1 View
2001-08-29 DRW Drawings-only black and white line drawings 8 View
2001-08-29 OATH Oath or Declaration filed 4 View
2001-08-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-08-29 SRFW Search information including classification, databases and other search related notes 1 View
2001-08-29 FWCLM Index of Claims 1 View
2001-08-29 DRW Drawings-only black and white line drawings 8 View
2001-08-29 TRNA Transmittal of New Application 3 View
2001-08-29 SPEC Specification 29 View
2001-08-29 CLM Claims 5 View
2001-08-29 ABST Abstract 1 View
2001-08-29 OATH Oath or Declaration filed 4 View
2001-08-29 WFEE Fee Worksheet (SB06) 1 View
2001-08-29 WFEE Fee Worksheet (SB06) 1 View
2001-08-29 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,790,287
App. No.
09/942,153
Filed
2001-08-29
Granted
2004-09-14
Pub. No.
US20020189758A1
Art Unit
1763
PTA
-143 days