Patent Assignment
Reel/Frame 012130/0550
Assignment of Assignor's Interest
Recorded: 2001-08-29
Pages: 2
Assignors
SHIGA, MASAYOSHI
Executed: 2001-08-21
HASHINOKI, KENJI
Executed: 2001-08-21
OHTANI, MASAMI
Executed: 2001-08-21
NISHIMURA, JOICHI
Executed: 2001-08-20
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TERANOUCHI-AGARU 4-CHOME, 1-1 TENJINKITAMACHI, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Inspection Method and Substrate Procesing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.