Thermal processing apparatus and thermal processing method
View Patent ↗In a thermal processing apparatus, using a lamp for heating a substrate, an opening is formed for a camera unit, which is used to image portions of an auxiliary ring supporting the substrate, to obtain the position of the center of the auxiliary ring. The camera further images the substrate to determine the center of the substrate before the thermal processing apparatus receives and places the substrate on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be designed to reduce overlaps of the auxiliary ring and the outer edge of the substrate while overlaps can be uniform over the entire circumference of the substrate to improve temperature uniformity of the substrate.
1. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system capturing images of a plurality of portions of said ring, further comprising a rotation mechanism rotating said ring while directing said ring toward a prescribed direction.
2. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system capturing images of a plurality of portions of said ring, wherein
said image pickup system includes a plurality of image pickup parts set on different positions.
3. The thermal processing apparatus according to claim 2 , wherein
said image pickup system includes at least three said image pickup parts set on different positions.
4. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system capturing images of a plurality of portions of said ring, further comprising a chamber storing said lamp, said ring and said substrate, wherein
said chamber is formed with an opening so that said image pickup system captures said images of said ring from outside said chamber through said opening.
5. The thermal processing apparatus according to claim 4 , wherein
said opening is formed on a position closer to said lamp than said substrate.
6. The thermal processing apparatus according to claim 4 , further comprising a light source part emitting illumination light for illuminating said ring through said opening.
7. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system comprising a plurality of image pickup parts capturing images of said outer edge of said substrate, wherein
said image pickup system comprises at least three said image pickup parts.
8. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system comprising a plurality of image pickup parts capturing images of said outer edge of said substrate, wherein
said image pickup system also captures an image of said ring.
9. The thermal processing apparatus according to claim 8 , wherein
the respective ones of said plurality of image pickup parts simultaneously capture respective said images of said outer edge of said substrate and said ring.
10. A thermal processing apparatus capable of heating a substrate with light, comprising:
a lamp irradiating said substrate with said light;
a ring enclosing the outer edge of said substrate and outwardly spreading from said outer edge; and
an image pickup system comprising a plurality of image pickup parts capturing images of said outer edge of said substrate, further comprising a chamber storing said lamp, said ring and said substrate, wherein
an opening is formed in said chamber so that said image pickup system captures said images of said outer edge of said substrate from outside said chamber through said opening.
11. The thermal processing apparatus according to claim 10 , wherein
said opening is formed on a position closer to said lamp than said substrate.
12. The thermal processing apparatus according to claim 10 , farther comprising a light source part emitting illumination light illuminating at least said outer edge of said substrate through said opening.