Heat treatment apparatus of light-emission type and method of cleaning same
View Patent ↗After the maintenance of a heat treatment apparatus, a susceptor and a heating plate are moved upwardly and a nitrogen gas flow from an inlet toward an outlet passage is produced prior to heat treating a semiconductor wafer. In this state, flash lamps are turned on to cause momentary expansion and contraction of the gas in a chamber, thereby scattering particles deposited on a bottom plate, etc. The scattered particles are removed by the nitrogen gas passing through a bottom portion of the chamber and discharged through the outlet passage. The particles are easily removed due to the flash lamps being turned on a predetermined number of times at fixed time intervals while folowing the nitrogen gas. The heat treatment apparatus has a light-emission characteristic and easily removes the particles in the chamber.
1. A heat treatment apparatus for exposing a substrate to a flash of light to heat the substrate, comprising:
a process chamber for receiving a substrate therein;
a flash lamp for emitting a flash of light toward the interior of said process chamber to scatter particles in a treatment space within said process chamber;
an exhaust element for exhausting gas from said treatment space; and
a control element for controlling said flash lamp to emit a flash of light toward the interior of said process chamber, with an objective substrate prohibited from being transported into said process chamber.
2. The heat treatment apparatus according to claim 1 , wherein
said exhaust element exhausts gas from said treatment space through a bottom portion of said process chamber.
3. The heat treatment apparatus according to claim 2 , further comprising
a gas supply element for supplying an inert gas to the bottom portion of said process chamber.
4. A heat treatment apparatus for exposing a substrate to flash of light to heat the substrate, comprising:
a process chamber for receiving a substrate therein;
a flash lamp for emitting a flash of light toward the interior of said process chamber;
an exhaust element for exhausting gas from a treatment space within said process chamber; and
a control element for controlling said flash lamp to emit a flash of light toward the interior of said process chamber, with an objective substrate prohibited from being transported into said process chamber.
5. The heat treatment apparatus according to claim 4 , wherein
said exhaust element exhausts gas from said treatment space through a bottom portion of said process chamber.
6. The heat treatment apparatus according to claim 5 , further comprising
a gas supply element for supplying an inert gas to the bottom portion of said process chamber.
7. A method of cleaning a heat treatment apparatus, said heat treatment apparatus exposing a substrate received in a process chamber to a flash of light to heat the substrate, said method comprising the steps of:
a) emitting a flash of light from a flash lamp toward the interior of said process chamber, with an objective substrate prohibited from being transported into said process chamber, to scatter particles in a treatment space within said process chamber; and
b) exhausting gas from said treatment space with the particles scattered therein.
8. The method according to claim 7 , wherein
said step b) includes exhausting gas from said treatment space through a bottom portion of said process chamber.
9. The method according to claim 8 , further comprising the step of
c) supplying an inert gas to the bottom portion of said process chamber.
10. A method of cleaning a heat treatment apparatus, said heat treatment apparatus exposing a substrate received in a process chamber to a flash of light to heat the substrate, said method comprising the steps of:
a) emitting a flash of light from a flash lamp toward the interior of said process chamber, with an objective substrate prohibited from being transported into said process chamber; and
b) exhausting gas from a treatment space within said process chamber.
11. The method according to claim 10 , wherein
said step b) includes exhausting gas from said treatment space through a bottom portion of said process chamber.
12. The method according to claim 11 , further comprising the step of
c) supplying an inert gas to the bottom portion of said process chamber.