IP Library › Granted Patent US 6,692,165
Granted Patent Utility
US 6,692,165 · Confirmation No. 4498

SUBSTRATE PROCESSING APPARATUS

Applicant: Soichi Nakano
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-01-05 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-02-28 TRNA Transmittal of New Application 1 View
2002-02-28 ADS Application Data Sheet 2 View
2002-02-28 A.PE Preliminary Amendment 5 View
2002-02-28 SPEC Specification 95 View
2002-02-28 CLM Claims 16 View
2002-02-28 ABST Abstract 1 View
2002-02-28 DRW Drawings-only black and white line drawings 49 View
2002-02-28 OATH Oath or Declaration filed 6 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,692,165
App. No.
10/090,099
Filed
2002-02-28
Granted
2004-02-17
Pub. No.
US20020121341A1
Art Unit
2851
PTA
-3 days