Patent Assignment
Reel/Frame 012672/0856
Assignment of Assignor's Interest
Recorded: 2002-02-28
Pages: 2
Assignors
TANAKA, AKIKO
Executed: 2002-01-29
SANADA, MASAKAZU
Executed: 2002-01-29
TAMADA, OSAMU
Executed: 2002-01-29
HARUMOTO, MASAHIKO
Executed: 2002-01-29
NAKANO, SOICHI (LEGAL REPRESENTATIVE OF DECEASED INVENTOR KAYOKO NAKANO
Executed: 2002-01-25
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.