Granted Patent
Utility
US 6,692,165 · App. 10/090,099
Substrate processing apparatus
Inventors:
Akiko Tanaka, Masakazu Sanada, Osamu Tamada, Masahiko Harumoto, Kayoko Nakano
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Feb 28, 2002
Inventors
Akiko Tanaka
Masakazu Sanada
Osamu Tamada
Masahiko Harumoto
Kayoko Nakano
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.