IP Library › Granted Patent US 6,511,315
Granted Patent Utility
US 6,511,315 · Confirmation No. 5775

SUBSTRATE PROCESSING APPARATUS

Inventor: Koji Hashimoto
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2002-01-16 TRNA Transmittal of New Application 1 View
2002-01-16 ADS Application Data Sheet 1 View
2002-01-16 SPEC Specification 16 View
2002-01-16 CLM Claims 2 View
2002-01-16 ABST Abstract 1 View
2002-01-16 DRW Drawings-only black and white line drawings 7 View
2002-01-16 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,511,315
App. No.
10/047,604
Filed
2002-01-16
Granted
2003-01-28
Pub. No.
US20020098458A1
Art Unit
3749
PTA
-139 days