Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light
View Patent ↗When a semiconductor wafer is preheated by halogen lamps, the temperature of a peripheral portion of the semiconductor wafer is lower than that of a central portion thereof. A laser light emitting part disposed immediately under the center of the semiconductor wafer is rotated about the center line of the semiconductor wafer, while laser light is directed from the laser light emitting part toward the peripheral portion of the semiconductor wafer. Thus, the irradiation spot of the laser light exiting the laser light emitting part swirls around along the peripheral portion of the back surface of the semiconductor wafer so as to draw a circular trajectory. As a result, the entire peripheral portion of the semiconductor wafer at a relatively low temperature is uniformly heated. This achieves a uniform in-plane temperature distribution of the semiconductor wafer.
1. A heat treatment apparatus for heating a substrate by irradiating the substrate with flashes of light, comprising:
a holder for holding a substrate in a horizontal position from below;
a flash lamp for irradiating the substrate held by said holder with flashes of light from above;
a preheating mechanism for irradiating the substrate held by said holder with light from below to preheat the substrate; and
an auxiliary irradiation part for directing light onto a local peripheral portion of the substrate preheated by said preheating mechanism, which local peripheral portion is lower in temperature than other regions of the peripheral portion of said substrate.
2. The heat treatment apparatus according to claim 1 ,
wherein said holder is made of quartz,
said preheating mechanism including a halogen lamp.
3. A heat treatment apparatus for heating a substrate by irradiating the substrate with flashes of light, comprising:
a holder made of quartz for holding a substrate in a horizontal position from below;
a flash lamp for irradiating the substrate held by said holder with flashes of light from above;
a preheating mechanism for irradiating the substrate held by said holder with light from below to preheat the substrate; and
an auxiliary irradiation part for directing light onto a local region of the substrate held by said holder which is lower in temperature than other regions of the substrate,
wherein
said auxiliary irradiation part includes a laser light irradiation part for directing laser light from below onto said local region of the substrate held by said holder.
4. The heat treatment apparatus according to claim 3 , wherein
said laser light irradiation part includes
a laser light emitting part disposed immediately under the center of the substrate held by said holder and configured to emit laser light toward a peripheral portion of the substrate, and
a rotating part for rotating said laser light emitting part about the center line of the substrate.
5. The heat treatment apparatus according to claim 4 , wherein
said laser light irradiation part further includes an elevating part for reciprocatingly upwardly and downwardly moving said laser light emitting part rotated by said rotating part.
6. The heat treatment apparatus according to claim 3 , wherein
said laser light irradiation part includes
a laser light scanning part for scanning a surface of the substrate held by said holder with emitted laser light.
7. A heat treatment apparatus for heating a substrate by irradiating the substrate with flashes of light, comprising:
a holder made of quartz for holding a substrate in a horizontal position from below;
a flash lamp for irradiating the substrate held by said holder with flashes of light from above;
a preheating mechanism for irradiating the substrate held by said holder with light from below to preheat the substrate; and
an auxiliary irradiation part for directing light onto a local region of the substrate held by said holder which is lower in temperature than other regions of the substrate,
wherein
said auxiliary irradiation part includes an arc light irradiation part for directing arc light in the form of an annular ring onto a peripheral portion of the substrate held by said holder.
8. A heat treatment apparatus for heating a substrate by irradiating the substrate with flashes of light, comprising:
a chamber for receiving a substrate;
a holder for holding the substrate in a horizontal position from below within said chamber;
a flash lamp for irradiating the substrate held by said holder with flashes of light from above;
an auxiliary irradiation part for directing light onto a lower surface of a local region of the substrate held by said holder which is lower in temperature than other regions of the substrate; and
a reflective part for further reflecting light directed from said auxiliary irradiation part and reflected from the lower surface of said substrate to cause the further reflected light to reach said local region.
9. The heat treatment apparatus according to claim 8 , wherein
the light reflected from the lower surface of the substrate enters said reflective part at an incident angle of zero degrees.
10. The heat treatment apparatus according to claim 8 , further comprising
an angle adjusting mechanism for adjusting an incident angle at which the light reflected from the lower surface of the substrate enters said reflective part.
11. The heat treatment apparatus according to claim 8 , wherein said reflective part is a mirror-finished portion of an inner wall surface of said chamber.
12. The heat treatment apparatus according to claim 8 , wherein
said auxiliary irradiation part includes a laser light irradiation part for directing laser light from below onto said local region of the substrate held by said holder.
13. The heat treatment apparatus according to claim 12 ,
wherein said laser light irradiation part includes
a laser light emitting part disposed immediately under the center of the substrate held by said holder and configured to emit laser light toward a peripheral portion of the substrate, and
a rotating part for rotating said laser light emitting part about the center line of the substrate, and
wherein said reflective part is provided in the form of an annular ring under the outside of said substrate.
14. The heat treatment apparatus according to claim 13 , wherein
said laser light irradiation part further includes an elevating part for reciprocatingly upwardly and downwardly moving said laser light emitting part rotated by said rotating part.
15. The heat treatment apparatus according to claim 8 ,
wherein said holder is made of quartz,
said heat treatment apparatus further comprising a halogen lamp for irradiating the substrate held by said holder with light from below to preheat the substrate.